Semiconductor metal oxide compounds based gas sensors: A literature review

被引：104

作者：

Patil, Sunil Jagannath ^{[1
,2
]}

Patil, Arun Vithal ^{[2
]}

Dighavkar, Chandrakant Govindrao ^{[2
]}

Thakare, Kashinath Shravan ^{[3
]}

Borase, Ratan Yadav ^{[3
]}

Nandre, Sachin Jayaram ^{[4
]}

Deshpande, Nishad Gopal ^{[5
]}

Ahire, Rajendra Ramdas ^{[1
]}

机构：

[1] SG Patil Arts Sci & Commerce Coll, Dept Phys, Sakri 424304, India

[2] LVH Coll, Dept Phys, Nasik 422003, India

[3] MSG Coll, Thin & Thick film Lab, Malegaon 423105, India

[4] Uttamrao Patil Coll Dahivel, Dept Phys, Dahivel, Maharashtra, India

[5] Shivaji Univ, Dept Phys, Kolhapur 416004, Maharashtra, India

来源：

FRONTIERS OF MATERIALS SCIENCE | 2015年 / 9卷 / 01期

关键词：

gas sensor; semiconductor metal oxide (SMO); sensitivity; air pollutant; gas response; THICK-FILM RESISTORS; NB-DOPED TIO2; VAPOR SENSING PROPERTIES; ELECTRICAL-PROPERTIES; H2S GAS; STRUCTURAL CHARACTERISTICS; SELECTIVE DETECTION; FIRING TEMPERATURE; SNO2; FILMS; ZNO;

D O I：

10.1007/s11706-015-0279-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper gives a statistical view about important contributions and advances on semiconductor metal oxide (SMO) compounds based gas sensors developed to detect the air pollutants such as liquefied petroleum gas (LPG), H2S, NH3, CO2, acetone, ethanol, other volatile compounds and hazardous gases. Moreover, it is revealed that the alloy/composite made up of SMO gas sensors show better gas response than their counterpart single component gas sensors, i.e., they are found to enhance the 4S characteristics namely speed, sensitivity, selectivity and stability. Improvement of such types of sensors used for detection of various air pollutants, which are reported in last two decades, is highlighted herein.

引用

页码：14 / 37

页数：24

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