3D conducting nanostructures fabricated using direct laser writing

被引:67
作者
Terzaki, Konstantina [1 ,2 ]
Vasilantonakis, Nikos [1 ,2 ]
Gaidukeviciute, Arune [1 ]
Reinhardt, Carsten [1 ]
Fotakis, Costas [1 ,3 ]
Vamvakaki, Maria [1 ,2 ]
Farsari, Maria [1 ]
机构
[1] Fdn Res & Technol Hellas FORTH, IESL, Iraklion 71110, Crete, Greece
[2] Univ Crete, Dept Mat Sci & Technol, Iraklion, Crete, Greece
[3] Univ Crete, Dept Phys, Iraklion, Crete, Greece
关键词
2-PHOTON POLYMERIZATION; PHOTONIC METAMATERIALS; MICROSTRUCTURES; SHRINKAGE;
D O I
10.1364/OME.1.000586
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report the 3D structuring and metallization of a zirconium-based organic-inorganic photosensitive material doped with metal-binding tertiary amine moieties. The influence of the amine group content on the material structurability, the structure resolution and the metallization efficiency was examined. The silver plating technique was also optimized by investigating the metal seeding and reduction parameters. We have compared the silver plating vs. the metal bath techniques and we have found that while the metal bath technique gives good quality metal coatings, ohmic conductivity can only be obtained by silver plating. (C) 2011 Optical Society of America
引用
收藏
页码:586 / 597
页数:12
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