Wavefront Aberration Measurement Deflectometry for Imaging Lens Tests

被引：10

作者：

Yu, Linzhi ^{[1
]}

Li, Dahai ^{[1
,2
]}

Ruan, Yilang ^{[1
]}

Zhang, Xinwei ^{[1
]}

Wang, Ruiyang ^{[1
]}

Xu, Kaiyuan ^{[3
]}

机构：

[1] Sichuan Univ, Coll Elect & Informat Engn, Chengdu 610065, Peoples R China

[2] Sichuan Univ, Sch Aeronaut & Astronaut, Chengdu 610065, Peoples R China

[3] China Acad Engn Phys, Res Ctr Laser Fus, Mianyang 621900, Sichuan, Peoples R China

来源：

APPLIED SCIENCES-BASEL | 2022年 / 12卷 / 15期

基金：

中国国家自然科学基金;

关键词：

wavefront aberration test; imaging lens; phase measuring deflectometry; REFRACTIVE OPTICS;

D O I：

10.3390/app12157857

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Lenses play an important role in imaging systems. Having an effective way to test the aberrations of imaging lenses is important. However, the existing methods cannot satisfy the requirements in some conditions. To overcome these difficulties, wavefront aberration measurement deflectometry (WAMD) is proposed in this paper, which can reconstruct the wavefront aberrations of imaging lenses by measuring the angular aberrations. The principle of WAMD is analyzed in detail, and the correctness and feasibility of the proposed method are verified by both a simulation and an experiment. A telephoto lens and a single imaging lens were tested in an experiment, and the RMS errors were 166.8 nm (5.71%) and 58.9 nm (4.74%), respectively, as compared with the interferometer's results. This method is widely applicable with relatively reasonable accuracy. It has potential to be applied in the lens manufacturing and alignment process.

引用

页数：10

共 43 条

[21] Study on the measurement error and scope of analytical gradient model in phase measuring deflectometry [J].

Yue, Huimin ;

Wu, Yuxiang ;

Li, Mingyang ;

Liu, Yong .

RESULTS IN PHYSICS, 2018, 11 :994-998

[22] Carrier frequency removal in phase measuring deflectometry with non-telecentric imaging [J].

Yue, Huimin ;

Wu, Yuxiang ;

Song, Lei ;

Zhao, Biyu ;

Ou, Zhonghua ;

Liu, Yong .

INTERNATIONAL CONFERENCE ON OPTICS IN PRECISION ENGINEERING AND NANOTECHNOLOGY (ICOPEN2013), 2013, 8769

[23] Three-dimensional shape measurement of aspheric mirrors with null phase measuring deflectometry [J].

Guo, Chunfeng ;

Hu, Anduo .

OPTICAL ENGINEERING, 2019, 58 (10)

[24] Transparent Element Surface Measurement Using Binary Pattern in Phase-Measuring Deflectometry [J].

Wang, Ruiyang ;

Li, Dahai .

ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS VIII, 2019, 11109

[25] Specular Surface Shape Measurement with Orthogonal Dual-Frequency Fourier Transform Deflectometry [J].

Li, Zhiming ;

Yin, Dayi ;

Yang, Yuanyu ;

Zhang, Quan ;

Gong, Huixing .

SENSORS, 2023, 23 (02)

[26] Marker-free stitching deflectometry for three-dimensional measurement of the specular surface [J].

Wang, Ruiyang ;

Li, Dahai ;

Zhang, Xinwei ;

Zheng, Wanxing ;

Yu, Linzhi ;

Ge, Renhao .

OPTICS EXPRESS, 2021, 29 (25) :41851-41864

[27] Simultaneous Determination of Both Surface Profiles of a Bifocal Lens Using Dual-Wavelength Transmission Deflectometry With Liquid [J].

Shin, Sanghoon ;

Yu, Younghun .

KOREAN JOURNAL OF OPTICS AND PHOTONICS, 2015, 26 (03) :147-154

[28] Specular surface deformation measurement based on projected-speckle deflectometry with digital image correlation [J].

Xiong, Chuanguo ;

Gao, Yuhan ;

Huang, Yuhua ;

Zhu, Fulong .

OPTICS AND LASERS IN ENGINEERING, 2023, 170

[29] High-precision measurement of low reflectivity specular object based on phase measuring deflectometry [J].

Yuxiang Wu ;

Huimin Yue ;

Yong Liu .

光电工程, 2017, 44 (08) :772-780+845

[30] Clear imaging specular surface and fringe patterns by using a concave mirror in phase measuring deflectometry [J].

Li, Ziyu ;

Liu, Xiaohong ;

Chang, Caixia ;

Shi, Yanqing ;

Gao, Nao ;

Meng, Zhaozong ;

Zhang, Zonghua .

OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS VIII, 2021, 11899

← 1 2 3 4 5 →