Enhanced ferroelectric properties of BaTiO3 films via rapid thermal processing

被引：0

作者：

Zhang, Min ^{[1
]}

Deng, Chaoyong ^{[1
]}

机构：

[1] Guizhou Univ, Coll Big Data & Informat Engn, Dept Elect Sci, Key Lab Elect Funct Composite Mat Guizhou Provinc, Guiyang, Peoples R China

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2020年 / 31卷 / 04期

基金：

中国国家自然科学基金;

关键词：

SERIES RESISTANCE; COMPOSITE FILMS; THIN-FILMS; TEMPERATURE; DEPENDENCE; POLARIZATION; MECHANISMS; STABILITY; BEHAVIOR; DIODES;

D O I：

10.1007/s10854-020-02859-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Single-crystal BaTiO 3 (BTO) films were prepared by pulsed laser deposition (PLD) on (100) SrRuO 3(SRO) buffered SrTiO 3 (STO) substrates, which were treated by rapid thermal processing (RTP) in the temperature range of 600-750.C. The XRD, Ferroelectric test system, Hall effect Test Station and current-voltage ( I-V) characteristics were used to study microstructure and electrical properties. The results show that the RTP temperature can affect the microstructure of films, the contact of the interfaces and ferroelectric properties. The films exhibit small leakage current, resistance, barrier height, and better ferroelectric properties treated by RTP at 650.C.

引用

页码：3130 / 3136

页数：7

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