Applications of electrochemical microfabrication: An introduction

被引:38
作者
Datta, M [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Div Res, Yorktown Heights, NY 10598 USA
关键词
D O I
10.1147/rd.425.0563
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
[No abstract available]
引用
收藏
页码:563 / 566
页数:4
相关论文
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