Integrating microsphere resonator and ZnO nanorods coated glass for humidity sensing application

被引：10

作者：

Jali, Mohd Hafiz ^{[1
]}

Rahim, Hazli Rafis Abdul ^{[2
]}

Johari, Md Ashadi Md ^{[3
]}

Ahmad, Aminah ^{[3
]}

Yusof, Haziezol Helmi Mohd ^{[2
]}

Johari, Siti Halma ^{[3
]}

Baharom, Mohamad Faizal ^{[1
]}

Thokchom, Siddharth ^{[4
]}

Dimyati, Kaharudin ^{[5
]}

Harun, Sulaiman Wadi ^{[5
]}

机构：

[1] Univ Tekn Malaysia Melaka, Fac Elect Engn, Melaka 76100, Malaysia

[2] Univ Tekn Malaysia Melaka, Fac Elect & Comp Engn, Melaka 76100, Malaysia

[3] Univ Tekn Malaysia Melaka, Fac Elect & Elect Engn Technol, Melaka 76100, Malaysia

[4] Assam Don Bosco Univ, Sch Technol, Gauhati 781017, Assam, India

[5] Univ Malaya, Dept Elect Engn, Kuala Lumpur 50603, Malaysia

来源：

OPTICS AND LASER TECHNOLOGY | 2021年 / 143卷

关键词：

Microsphere resonator; Whispering gallery modes; Zinc oxide nanorods; Evanescent wave; Humidity sensor; SENSOR; FIBER; SENSITIVITY; SURFACE;

D O I：

10.1016/j.optlastec.2021.107356

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A humidity sensor is proposed by integrating a microsphere resonator onto ZnO nanorods coated glass surface. The glass substrate was coated with ZnO nanorods for 12 h using the hydrothermal method and the microsphere was set at a diameter of 234 mu m. The proposed sensor produced sensitivity of 0.0748 dBm/%RH and 0.0142 nm/ %RH when exposed to humidity level ranging from 35 %RH to 85 %RH. Standard deviation and resolution of the proposed sensor improve by a factor of 1.7 and 2.4 respectively as compared to the straight microfiber laid on the ZnO nanorods coated glass. It utilized the ultra-high Q factor of microsphere and the changeable refractive index of the ZnO nanorods coated glass. Combination of these elements enhanced the interaction between the whispering gallery mode evanescent components with surrounds analyte. It also solves the issues pertaining to the complicated handling of microfibers during the coating process. The proposed sensor has shown exceptional experiment results for humidity sensing applications.

引用

页数：8

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