Current status of EUV optics and future advancements in optical components

被引：0
|
作者：
Sweeney, D [1 ]
机构：
[1] Univ Calif Lawrence Livermore Natl Lab, Livermore, CA 94550 USA
来源：
MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS | 2000年
关键词：
D O I：
10.1109/IMNC.2000.872763
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：280 / 281
页数：2
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