RF MEMS phase shifters based on PCB MEMS technology

被引:13
作者
Ramadoss, R [1 ]
Sundaram, A
Feldner, LM
机构
[1] Auburn Univ, Dept Elect & Comp Engn, Auburn, AL 36849 USA
[2] Sandia Natl Labs, Albuquerque, NM 87123 USA
关键词
D O I
10.1049/el:20051074
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An X-band main-line type loaded line RF MEMS phase shifter fabricated using printed circuit based MEMS technology is reported. The phase shifter provides a phase shift of 31.6 degrees with a minimum insertion loss of 0.56 dB at 9 GHz for an applied DC bias voltage of 40 V These phase shifters are suitable for monolithic integration with low-cost phased arrays on Teflon or Polyimide such as low dielectric constant substrates.
引用
收藏
页码:654 / 656
页数:3
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