A New Approach for Single-Event Effects Testing With Heavy Ion and Pulsed-Laser Irradiation: CMOS/SOI SRAM Substrate Removal

被引:20
作者
Kanyogoro, Nderitu [1 ]
Buchner, Stephen [1 ,2 ]
McMorrow, Dale [2 ]
Hughes, Harold [2 ]
Liu, Michael S. [3 ]
Hurst, Al [4 ]
Carpasso, Charles [5 ]
机构
[1] GTEC, Crofton, MD 21114 USA
[2] USN, Res Lab, Washington, DC 20375 USA
[3] TSS, Bloomington, MN 55437 USA
[4] Trusted Semicond Solut, Anoka, MN 55303 USA
[5] Freescale Semicond, Austin, TX 78535 USA
关键词
Heavy ions; laser; silicon substrate; single-event upset; SRAM;
D O I
10.1109/TNS.2010.2085450
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel methodology for completely removing the silicon substrate of SOI devices for single-event effects testing is introduced and demonstrated using a 90 nm, 4 Mb SRAM test vehicle. Applications and significance are discussed.
引用
收藏
页码:3414 / 3418
页数:5
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