Enhanced Tracking for Nanopositioning Systems Using Feedforward/Feedback Multivariable Control Design

被引：25

作者：

Kara-Mohamed, Mohamed ^{[1
]}

Heath, William P. ^{[1
]}

Lanzon, Alexander ^{[1
]}

机构：

[1] Univ Manchester, Sch Elect & Elect Engn, Control Syst Ctr, Manchester M13 9PL, Lancs, England

来源：

IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY | 2015年 / 23卷 / 03期

基金：

英国工程与自然科学研究理事会;

关键词：

Feedback; feedforward; multivariable control design; nanopositioning; tracking; VIBRATION COMPENSATION; IDENTIFICATION;

D O I：

10.1109/TCST.2014.2360498

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper proposes a systematic synthesis methodology for a combined feedforward/feedback architecture to control multiple-input, multiple-output nanopositioning systems. Coprime factorization of the open loop model is used to design the reference and feedforward filters of the proposed control scheme to achieve enhanced tracking, eliminate the limitation of the feedback on tracking performance, and increase the bandwidth of the closed-loop system. Two types of coprime factorization, namely inner-outer factorization and normalized coprime factorization are discussed. A case study based on hardware experiment is presented to analyze the proposed control architecture and demonstrate its superiority over feedback-only control. In addition to the no-load case, the performance of the system is also tested with loads on the nanopositioning stage.

引用

页码：1003 / 1013

页数：11

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