Femtosecond-laser-ablation induced transformations in the structure and surface properties of diamond-like nanocomposite films

被引:24
|
作者
Pimenov, S. M. [1 ]
Zavedeev, E., V [1 ]
Arutyunyan, N. R. [1 ]
Presniakov, M. Yu [2 ]
Zilova, O. S. [3 ]
Shupegin, M. L. [3 ]
Jaeggi, B. [4 ,5 ]
Neuenschwander, B. [4 ]
机构
[1] Russian Acad Sci, Prokhorov Gen Phys Inst, Moscow 119991, Russia
[2] Natl Res Ctr Kurchatov Inst, Moscow 123182, Russia
[3] Natl Res Univ Moscow Power Engn Inst, Moscow 111250, Russia
[4] Bern Univ Appl Sci, Inst Appl Laser Photon & Surface Technol ALPS, CH-3400 Burgdorf, Switzerland
[5] Lasea Switzerland SA, CH-2502 Biel, Switzerland
基金
俄罗斯科学基金会;
关键词
Diamond-like nanocomposite films; Femtosecond laser ablation; Micropatterning; Graphitization; SiC nanocrystals; Wettability; TRIBOLOGICAL PROPERTIES; THERMAL-STABILITY; CARBON-FILMS; FORCES; CAPILLARY; FRICTION;
D O I
10.1016/j.apsusc.2019.144907
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Femtosecond laser ablation processing is applied for surface modification and micropatterning of diamond-like nanocomposite (DLN) films (a-C:H:Si:O films). Using a visible femtosecond laser (wavelength 515 nm, pulse duration 320 fs), microgroove patterns have been fabricated on the DLN films, aimed at further studies of their properties. The studies were focused on (i) structural transformations in the surface layers using Raman spectroscopy and transmission electron microscopy (TEM), (ii) wettability of laser-patterned films, and (iii) nano/microscale friction properties of laser-patterned DLN films using lateral force microscopy. Raman spectroscopy and TEM data showed characteristic features of the surface graphitization during ultrashort-pulse ablation. High resolution TEM study of the microgrooves revealed the formation of cubic SiC nanocrystals (4-8 nm size) on the laser-ablated surface. The water contact angle measurements showed anisotropic wetting behavior of the grooved surfaces (the contact angle was different in the directions parallel and perpendicular to microgrooves), depending on the groove depth (aspect ratio). Lateral force microscopy examination (with micro-sized Si tips) showed that the laser-patterned regions exhibited low friction properties compared to the original surface. The obtained results demonstrate that femtosecond laser processing is an effective technique to generate new properties of hard DLN coatings at the micro and macroscale.
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页数:8
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