An electron spectroscopy study of a-C:H films produced by PACVD in a CH4-CO2 gas mixture

被引：9

作者：

Calliari, L ^{[1
]}

Filippi, M ^{[1
]}

Gottardi, G ^{[1
]}

Laidani, N ^{[1
]}

Anderle, M ^{[1
]}

机构：

[1] IRST, ITC, Ctr Ric Sci & Tecnol, I-38050 Trento, Italy

来源：

SURFACE SCIENCE | 2005年 / 586卷 / 1-3期

关键词：

hydrogenated amorphous carbon films; X-ray photoelectron spectroscopy; UV photoelectron spectroscopy; Auger electron spectroscopy; electron energy loss spectroscopy; surface structure;

D O I：

10.1016/j.susc.2005.05.002

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The near surface region microstructure of a PACVD a-C:H film is investigated by probing the occupied electron states by electron energy loss spectroscopy (EELS) in the low loss region, C KVV Auger emission, Cls photoemission, X-ray and UV excited valence band (VB) photoemission. The film, deposited under pulsed bias voltage, is described as a hydrogenated amorphous carbon material, possibly involving a small amount (a few at.%) of oxygen. The C electron states are dominantly sp(3) hybridized, with H stabilizing the associated tetrahedral bond. A maximum of approximate to 35% sp(2) bonded carbons exists in the system. The sp(2) sites do not gather into extended pi bonded graphite-like structures, thereby allowing the existence of a large (>= 1.8 eV) energy gap. The presence of H explains the mass density (1.7 g/cm(3)) and hardness (approximate to 10 GPa) of the film which both classify it, in spite of the high sp(3) fraction, at the border between soft and hard a-C:H materials. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：96 / 108

页数：13

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