Analysis and optimization of love wave liquid sensors

被引：46

作者：

Jakoby, B ^{[1
]}

Vellekoop, MJ ^{[1
]}

机构：

[1] Delft Univ Technol, DIMES, Elect Instrumentat Lab, NL-2628 CD Delft, Netherlands

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1998年 / 45卷 / 05期

关键词：

D O I：

10.1109/58.726456

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Love wave sensors are highly sensitive microacoustic devices, which are well suited for liquid sensing applications thanks to the shear polarization of the wave. The sensing mechanism thereby relies on the mechanical (or acoustic) interaction of the device with the liquid. The successful utilization of Love wave devices for this purpose requires proper shielding to avoid unwanted electric interaction of the liquid with the wave and the transducers. In this work we describe the effects of this electric interaction and the proper design of a shield to prevent it. We present analysis methods, which illustrate the impact of the interaction and which help to obtain an optimized design of the proposed shield. We also present experimental results for devices that have been fabricated according to these design rules.

引用

页码：1293 / 1302

页数：10

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