Loose abrasive slurries for optical glass lapping

被引：41

作者：

Neauport, Jerome ^{[1
]}

Destribats, Julie ^{[1
]}

Maunier, Cedric ^{[1
]}

Ambard, Chrystel ^{[2
]}

Cormont, Philippe ^{[1
]}

Pintault, B. ^{[2
]}

Rondeau, Olivier ^{[2
]}

机构：

[1] CEA, CESTA, F-33114 Le Barp, France

[2] CEA Le Ripault, F-37260 Monts, France

来源：

APPLIED OPTICS | 2010年 / 49卷 / 30期

关键词：

SUBSURFACE DAMAGE; FUSED-SILICA; SURFACES; CRACKS; MODEL;

D O I：

10.1364/AO.49.005736

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Loose abrasive lapping is widely used to prepare optical glass before its final polishing. We carried out a comparison of 20 different slurries from four different vendors. Slurry particle sizes and morphologies were measured. Fused silica samples were lapped with these different slurries on a single side polishing machine and characterized in terms of surface roughness and depth of subsurface damage (SSD). Effects of load, rotation speed, and slurry concentration during lapping on roughness, material removal rate, and SSD were investigated. (C) 2010 Optical Society of America

引用

页码：5736 / 5745

页数：10

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