Molecule-Upgraded van der Waals Contacts for Schottky-Barrier-Free Electronics

被引:38
|
作者
Zhang, Xiankun [1 ,2 ,3 ]
Kang, Zhuo [1 ,2 ,3 ]
Gao, Li [1 ,2 ]
Liu, Baishan [1 ,2 ]
Yu, Huihui [1 ,2 ]
Liao, Qingliang [1 ,2 ,3 ]
Zhang, Zheng [1 ,2 ,3 ]
Zhang, Yue [1 ,2 ,3 ]
机构
[1] Univ Sci & Technol Beijing, Sch Mat Sci & Engn, Acad Adv Interdisciplinary Sci & Technol, Beijing 100083, Peoples R China
[2] Univ Sci & Technol Beijing, Beijing Key Lab Adv Energy Mat & Technol, Beijing Adv Innovat Ctr Mat Genome Engn, Beijing 100083, Peoples R China
[3] Univ Sci & Technol Beijing, Sch Mat Sci & Engn, State Key Lab Adv Met & Mat, Beijing 100083, Peoples R China
基金
中国国家自然科学基金;
关键词
contact resistance; electronic devices; in situ defect healing; molecule treatment; Schottky barrier; van der Waals contacts; HIGH-PERFORMANCE WSE2; METAL CONTACTS; MONOLAYER MOS2; RESISTANCE; LAYER;
D O I
10.1002/adma.202104935
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The applications of any ultrathin semiconductor device are inseparable from high-quality metal-semiconductor contacts with designed Schottky barriers. Building van der Waals (vdWs) contacts of 2D semiconductors represents an advanced strategy of lowering the Schottky barrier height by reducing interface states, but will finally fail at the theoretical minimum barrier due to the inevitable energy difference between the semiconductor electron affinity and the metal work function. Here, an effective molecule optimization strategy is reported to upgrade the general vdWs contacts, achieving near-zero Schottky barriers and creating high-performance electronic devices. The molecule treatment can induce the defect healing effect in p-type semiconductors and further enhance the hole density, leading to an effectively thinned Schottky barrier width and improved carrier interface transmission efficiency. With an ultrathin Schottky barrier width of approximate to 2.17 nm and outstanding contact resistance of approximate to 9 k omega mu m in the optimized Au/WSe2 contacts, an ultrahigh field-effect mobility of approximate to 148 cm(2) V-1 s(-1) in chemical vapor deposition grown WSe2 flakes is achieved. Unlike conventional chemical treatments, this molecule upgradation strategy leaves no residue and displays a high-temperature stability at >200 degrees C. Furthermore, the Schottky barrier optimization is generalized to other metal-semiconductor contacts, including 1T-PtSe2/WSe2, 1T '-MoTe2/WSe2, 2H-NbS2/WSe2, and Au/PdSe2, defining a simple, universal, and scalable method to minimize contact resistance.
引用
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页数:10
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