Nonlinear Dynamics in Aluminum Nitride Contour-Mode Resonators

被引：0
作者：
Miller, Nicholas [1 ]
Piazza, Gianluca [1 ]
机构：
[1] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA
来源：
2013 JOINT EUROPEAN FREQUENCY AND TIME FORUM & INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFC) | 2013年
关键词：
Aluminum nitride contour-mode resonator; nonlinear; self-heating; MEMS; MEMS RESONATORS;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
In this work we discuss the self-heating dynamics of aluminum nitride contour mode resonators. The self-heating introduces a quadratic coupling between the resonator motion and its temperature. This coupling produces a nonlinear frequency response identical to the Duffing resonator in steady-state. However, since the thermal relaxation rate is much smaller than the mechanical relaxation rate the dynamics of the resonator differ from the conventional Duffing resonator.
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页码：9 / 12
页数：4
相关论文
共 14 条
  • [1] Giovannini M., 2012, FREQ CONTR S FCS 201, P1
  • [2] Temperature-Compensated Aluminum Nitride Lamb Wave Resonators
    Lin, Chih-Ming
    Yen, Ting-Ta
    Lai, Yun-Ju
    Felmetsger, Valery V.
    Hopcroft, Matthew A.
    Kuypers, Jan H.
    Pisano, Albert P.
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2010, 57 (03) : 524 - 532
  • [3] Nayfeh A.H., 1995, Nonlinear Oscillations
  • [4] Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators
    Piazza, Gianluca
    Stephanou, Philip J.
    Pisano, Albert P.
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (06) : 1406 - 1418
  • [5] Integrated aluminum nitride piezoelectric microelectromechanical system for radio front ends
    Piazza, Gianluca
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2009, 27 (04): : 776 - 784
  • [6] Single-chip multiple-frequency ALN MEMS filters based on contour-mode piezoelectric resonators
    Piazza, Gianluea
    Stephanou, Philip J.
    Pisano, Albert P.
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (02) : 319 - 328
  • [7] RINALDI M, 2009, MICR SYST 2009 22 IE, P916
  • [8] Super-High-Frequency Two-Port AlN Contour-Mode Resonators for RF Applications
    Rinaldi, Matteo
    Zuniga, Chiara
    Zuo, Chengjie
    Piazza, Gianluca
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2010, 57 (01) : 38 - 45
  • [9] Segovia-Fernandez J., 2013, THERMAL NONLIN UNPUB
  • [10] GHZ CONTOUR EXTENSIONAL MODE ALUMINUM NITRIDE MEMS RESONATORS
    Stephanou, P. J.
    Pisano, A. P.
    [J]. 2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS, 2006, : 2401 - 2404
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