Influence of laser power on orientation, microstructure and electrical performance of YBa2Cu3O7-x film prepared on (001) SrTiO3 single crystal substrate by spray atomizing and coprecipitating laser chemical vapor deposition

被引:5
作者
Zhao, Pei [1 ]
Wang, Ying [1 ]
Huang, Zhi Liang [1 ]
Mao, Yang Wu [1 ]
Takashi, Goto [2 ]
机构
[1] Wuhan Inst Technol, Sch Mat Sci & Engn, Wuhan 430074, Peoples R China
[2] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan
基金
中国国家自然科学基金;
关键词
YBa2Cu3O7-x film; Laser chemical vapor deposition; SrTiO3 single crystal; COATED CONDUCTOR DEVELOPMENT; MULTIPLE-STAGE CVD; THIN-FILMS; MULTISTAGE CVD; TEMPERATURE; GROWTH; JAPAN;
D O I
10.1016/j.ceramint.2014.11.027
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
YBa2Cu3O7-x film was prepared on (001) SrTiO3 single crystal substrate by spray atomizing and coprecipitating laser chemical vapor deposition. At laser power of 101-116 W (corresponding deposition temperature was 893-942 K), a-axis-oriented YBa2Cu3O7-x film was prepared, which showed an epitaxial growth mode of YBa2Cu3O7-x [100]|| SrTiO3 [001] (YBa2Cu3O7-x [001]||SrTiO3 [100]). The a-axis-oriented YBa2Cu3O7-x film had critical temperature of 75-82 K, with critical current density from 0 to 0.4 MA cm(-2). At laser power of 167-181 W (corresponding deposition temperature was 1093-1154 K), c-axis-oriented YBa2Cu3O7-x film was obtained, whose epitaxial growth mode was YBa2Cu3O7-x [001]||SrTiO3 [001] (YBa2Cu3O7-x [100]||SrTiO3 [100]). A c-axis-oriented YBa2Cu3O7-x film prepared at a deposition rate of 14 mu m h(-1) showed a high critical temperature of 91 K and critical current density of 2.8 MA cm(-2). (C) 2014 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
引用
收藏
页码:3624 / 3630
页数:7
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