On the use of the matrix pencil method for deep level transient spectroscopy:: MP-DLTS

被引：6

作者：

Boussaïd, F ^{[1
]}

Olivié, F ^{[1
]}

Benzohra, M ^{[1
]}

Martinez, A ^{[1
]}

机构：

[1] CNRS, Lab Anal & Architecture Syst, LAAS, F-31077 Toulouse, France

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1998年 / 47卷 / 03期

关键词：

capacitance transients; deep levels; deep level transient spectroscopy (DLTS); DLTS resolution; matrix pencil; (MP) method;

D O I：

10.1109/19.744327

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new approach to capacitance transient analysis, based on the matrix pencil (MP) method, is proposed for deep level transient spectroscopy (DLTS) (MP-DLTS). The MP method offers the least statistical variance of the estimates in the presence of noise, Simulation tests have shown this method to lead to a significant improvement in DLTS resolution even for low trap concentrations. Its noise sensitivity and resolution are quantified and compared with five different DLTS analysis techniques. The MP-DLTS method is found to outperform both DLTS spectrum and direct transient analysis techniques. An experimental investigation of the electrically active defects induced by a germanium preamorphization step prior to dopant implantation was undertaken using the MP-DLTS method. Two electron traps were detected in all samples and characterized.

引用

页码：692 / 697

页数：6

共 17 条

[1]

[Anonymous], 1993, MATRIX COMPUTATIONS

[2] Electronic defect levels in ultra-shallow p(+)n-junctions formed by low-energy B ion implantation into Ge-preamorphized silicon [J].

Benzohra, M ;

Olivie, F ;

Boussaid, F ;

Alquier, D ;

Martinez, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (7A) :4346-4350

[3]

BLOOD P, 1992, TECHNIQUES PHYSICS, V14

[4] Electrically active defects in BF2+ implanted and germanium preamorphized silicon [J].

Boussaid, F ;

Benzohra, M ;

Olivie, F ;

Alquier, D ;

Martinez, A .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 134 (02) :195-201

[5] COMPARISON OF COVARIANCE LINEAR PREDICTIVE MODELING TO THE MODULATION FUNCTION-METHOD FOR USE IN DEEP-LEVEL TRANSIENT SPECTROSCOPY [J].

DOOLITTLE, WA ;

ROHATGI, A .

JOURNAL OF APPLIED PHYSICS, 1994, 75 (09) :4560-4569

[6]

DOOLITTLE WA, 1994, J APPL PHYS, V75, P4590

[7] MATRIX PENCIL METHOD FOR ESTIMATING PARAMETERS OF EXPONENTIALLY DAMPED UNDAMPED SINUSOIDS IN NOISE [J].

HUA, Y ;

SARKAR, TK .

IEEE TRANSACTIONS ON ACOUSTICS SPEECH AND SIGNAL PROCESSING, 1990, 38 (05) :814-824

[8] GENERALIZED PENCIL-OF-FUNCTION METHOD FOR EXTRACTING POLES OF AN EM SYSTEM FROM ITS TRANSIENT-RESPONSE [J].

HUA, Y ;

SARKAR, TK .

IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 1989, 37 (02) :229-234

[9] REFINEMENTS IN THE METHOD OF MOMENTS FOR ANALYSIS OF MULTIEXPONENTIAL CAPACITANCE TRANSIENTS IN DEEP-LEVEL TRANSIENT SPECTROSCOPY [J].

IKOSSIANASTASIOU, K ;

ROENKER, KP .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (01) :182-190

[10] THE ANALYSIS OF EXPONENTIAL AND NON-EXPONENTIAL TRANSIENTS IN DEEP-LEVEL TRANSIENT SPECTROSCOPY [J].

KIRCHNER, PD ;

SCHAFF, WJ ;

MARACAS, GN ;

EASTMAN, LF ;

CHAPPELL, TI ;

RANSOM, CM .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) :6462-6470

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