Reversibility of the perovskite-to-fluorite phase transformation in lead-based thin and ultrathin films

被引:46
作者
Brennecka, Geoff L. [1 ]
Parish, Chad M. [1 ]
Tuttle, Bruce A. [1 ]
Brewer, Luke N. [1 ]
Rodriguez, Mark A. [1 ]
机构
[1] Ctr Mat Sci & Engn, Sandia Natl Labs, Albuquerque, NM 87123 USA
关键词
D O I
10.1002/adma.200702442
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
As film thicknesses decrease below 50 nm, control of cation stoichiometry in Pb-based dielectrics becomes increasingly difficult, a problem that is exacerbated by interaction with technologically important Pt bottom electrodes. Post-crystallization annealing in a Pb-rich atmosphere is shown to be a general technique to reversibly convert low-permittivity Pb-deficient fluorite into ferroelectric high-permittivity stoichiometric perovskite with outstanding dielectric properties (see figure).
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收藏
页码:1407 / +
页数:6
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