Dynamic characteristics control of DLC nano-resonator fabricated by focused-ion-beam chemical vapor deposition

The authors fabricated a resonant frequency-tunable diamondlike carbon (DLC) resonator by focused-ion-beam chemical vapor deposition and a wet-etching process for fabrication of a functional resonant device. The resonant frequency of the DLC resonator with a cantilever shape was controlled electrically via the electrostatic attractive force generated by the opposite electrode. As a result, we achieved an extremely large resonant frequency tuning ratio of approximately 730%. This indicates that the electrostatic attractive force, when added to the restorative force of the DLC resonator, works effectively to change the resonant frequency. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3662493]