Dependence of Zn1-xMgxO:P film properties on magnesium concentration

被引:2
作者
Kim, H. S. [1 ]
Lugo, F. [1 ]
Pearton, S. J. [1 ]
Norton, D. P. [1 ]
Ren, F. [2 ]
机构
[1] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Chem Engn, Gainesville, FL 32611 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2008年 / 26卷 / 03期
基金
美国国家科学基金会;
关键词
D O I
10.1116/1.2917079
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The dependence of p-type conversion on Mg content in Zn1-xMgxO:P films (x=0.1,0.05) is examined. As-grown Zn0.95Mg0.05O:P films were n type but converted to p type after rapid thermal annealing. p-type Zn1-xMgxO:P films were successfully achieved without post-thermal annealing treatments for a Mg content of x=0.10. Increasing magnesium content in the ZnMgO:P solid solution generally degrades the luminescence properties, suggesting the formation of nonradiative states. (C) 2008 American Vacuum Society.
引用
收藏
页码:968 / 972
页数:5
相关论文
共 44 条
[1]   Optically pumped lasing of ZnO at room temperature [J].
Bagnall, DM ;
Chen, YF ;
Zhu, Z ;
Yao, T ;
Koyama, S ;
Shen, MY ;
Goto, T .
APPLIED PHYSICS LETTERS, 1997, 70 (17) :2230-2232
[2]   Synthesis and defect-related emission of ZnO based light emitting device with homo- and heterostructure [J].
Bian, Jiming ;
Liu, Weifeng ;
Sun, Jingchang ;
Liang, Hongwei .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2007, 184 (1-3) :451-454
[3]   Effects of post-annealing temperature on structural, optical, and electrical properties of ZnO and Znl-xMgxO films by reactive RF magnetron sputtering [J].
Choi, CH ;
Kim, SH .
JOURNAL OF CRYSTAL GROWTH, 2005, 283 (1-2) :170-179
[4]   Development of MgZnO-ZnO-AlGaN heterostructures for ultraviolet light emitting applications [J].
Dong, JW ;
Osinsky, A ;
Hertog, B ;
Dabiran, AM ;
Chow, PP ;
Heo, YW ;
Norton, DP ;
Pearton, SJ .
JOURNAL OF ELECTRONIC MATERIALS, 2005, 34 (04) :416-423
[5]   Microstructure and properties of epitaxial antimony-doped p-type ZnO films fabricated by pulsed laser deposition [J].
Guo, W. ;
Allenic, A. ;
Chen, Y. B. ;
Pan, X. Q. ;
Che, Y. ;
Hu, Z. D. ;
Liu, B. .
APPLIED PHYSICS LETTERS, 2007, 90 (24)
[6]   Properties of phosphorus-doped (Zn,Mg)O thin films and device structures [J].
Heo, YW ;
Kwon, YW ;
Li, Y ;
Pearton, SJ ;
Norton, DP .
JOURNAL OF ELECTRONIC MATERIALS, 2005, 34 (04) :409-415
[7]   Depletion-mode ZnO nanowire field-effect transistor [J].
Heo, YW ;
Tien, LC ;
Kwon, Y ;
Norton, DP ;
Pearton, SJ ;
Kang, BS ;
Ren, F .
APPLIED PHYSICS LETTERS, 2004, 85 (12) :2274-2276
[8]   Electrical transport properties of single ZnO nanorods [J].
Heo, YW ;
Tien, LC ;
Norton, DP ;
Kang, BS ;
Ren, F ;
Gila, BP ;
Pearton, SJ .
APPLIED PHYSICS LETTERS, 2004, 85 (11) :2002-2004
[9]   p-type behavior in phosphorus-doped (Zn,Mg)O device structures [J].
Heo, YW ;
Kwon, YW ;
Li, Y ;
Pearton, SJ ;
Norton, DP .
APPLIED PHYSICS LETTERS, 2004, 84 (18) :3474-3476
[10]   Transport properties of phosphorus-doped ZnO thin films [J].
Heo, YW ;
Park, SJ ;
Ip, K ;
Pearton, SJ ;
Norton, DP .
APPLIED PHYSICS LETTERS, 2003, 83 (06) :1128-1130