X-ray Reflectivity and Photoelectron Spectroscopy of Superlattices with Silicon Nanocrystals

被引：4
|
作者：
Zhigunov, D. M. [1 ]
Kamenskikh, I. A. [1 ]
Lebedev, A. M. [2 ]
Chumakov, R. G. [2 ]
Logachev, Yu. A. [1 ]
Yakunin, S. N. [2 ]
Kashkarov, P. K. [1 ,2 ]
机构：
[1] Moscow MV Lomonosov State Univ, Fac Phys, Moscow 119991, Russia
[2] Kurchatov Inst, Natl Res Ctr, Moscow 123182, Russia
来源：
JETP LETTERS | 2017年 / 106卷 / 08期
关键词：
OPTICAL-PROPERTIES; MATRIX;
D O I：
10.1134/S0021364017200140
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The structural properties and features of the chemical composition of SiOxNy/SiO2, SiOxNy/Si3N4, and SiNx/Si3N4 multilayer thin films with ultrathin (1-1.5 nm) barrier SiO2 or Si3N4 layers are studied. The films have been prepared by plasma chemical vapor deposition and have been annealed at a temperature of 1150 degrees C for the formation of silicon nanocrystals in the SiOxNy or SiNx silicon-rich layers with a nominal thickness of 5 nm. The period of superlattices in the studied samples has been estimated by X-ray reflectivity. The phase composition of superlattices has been studied by X-ray electron spectroscopy using the decomposition of photoelectron spectra of the Si 2p, N 1s, and O 1s levels into components corresponding to different charge states of atoms.
引用
收藏
页码：517 / 521
页数：5
相关论文
共 50 条
  • [41] X-ray diffraction study of the elastic properties of jagged spherical CdS nanocrystals
    Dey, Pijush Ch
    Sarkar, Sumit
    Das, Ratan
    MATERIALS SCIENCE-POLAND, 2020, 38 (02): : 271 - 278
  • [42] X-ray photoelectron spectroscopy study of highly-doped ZnO: Al,N films grown at O-rich conditions
    Ievtushenko, A.
    Khyzhun, O.
    Shtepliuk, I.
    Bykov, O.
    Jakiela, R.
    Tkach, S.
    Kuzmenko, E.
    Baturin, V.
    Karpenko, O.
    Olifan, O.
    Lashkarev, G.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 722 : 683 - 689
  • [43] X-ray photoelectron spectroscopy investigations of band offsets in Ga0.02Zn0.98O/ZnO heterojunction for UV photodetectors
    Singh, Karmvir
    Rawal, Ishpal
    Punia, Rajesh
    Dhar, Rakesh
    JOURNAL OF APPLIED PHYSICS, 2017, 122 (15)
  • [44] X-ray spectroscopy and electronic structure of MoO2
    Stoeberl, V.
    Abbate, M.
    Alves, L. M. S.
    dos Santos, C. A. M.
    Mossanek, R. J. O.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 691 : 138 - 143
  • [45] Local chemical states and thermal stabilities of nitrogen dopants in ZnO film studied by temperature-dependent x-ray photoelectron spectroscopy
    Li, X. H.
    Xu, H. Y.
    Zhang, X. T.
    Liu, Y. C.
    Sun, J. W.
    Lu, Y. M.
    APPLIED PHYSICS LETTERS, 2009, 95 (19)
  • [46] Effects of Ar+ etching of Cu2ZnSnSe4 thin films: An x-ray photoelectron spectroscopy and photoluminescence study
    Yakushev, Michael V.
    Sulimov, Mikhail A.
    Skidchenko, Ekaterina
    Marquez-Prieto, Jose
    Forbes, Ian
    Edwards, Paul R.
    Kuznetsov, Mikhail V.
    Zhivulko, Vadim D.
    Borodavchenko, Olga M.
    Mudryi, Alexander V.
    Krustok, Juri
    Martin, Robert W.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2018, 36 (06):
  • [47] Novel Ni-Doped Bismuth-Magnesium Tantalate Pyrochlores: Structural and Electrical Properties, Thermal Expansion, X-ray Photoelectron Spectroscopy, and Near-Edge X-ray Absorption Fine Structure Spectra
    Zhuk, Nadezhda A.
    Krzhizhanovskaya, Maria G.
    Sekushin, Nikolay A.
    Kharton, Vladislav V.
    Koroleva, Alexandra, V
    Nekipelov, Sergey, V
    Sivkov, Danil, V
    Sivkov, Viktor N.
    Makeev, Boris A.
    Lebedev, Alexey M.
    Chumakov, Ratibor G.
    Kovalenko, Sofia Yu
    ACS OMEGA, 2021, 6 (36): : 23262 - 23273
  • [48] Structural Modelling of Hybrid ZnO-CdSe Nano-Compounds Using X-ray Photoelectron Spectroscopy Depth-Profiling Technique
    Jain, Shefali
    Singh, Akanksha
    Kumar, Mahesh
    Sharma, Shailesh Narain
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2020, 20 (06) : 3741 - 3753
  • [49] Synthesis, structural, X-ray photoelectron spectroscopy (XPS) studies and IR induced anisotropy of Tl4HgI6 single crystals
    Parasyuk, O. V.
    Khyzhun, O. Y.
    Piasecki, M.
    Kityk, I. V.
    Lakshminarayana, G.
    Luzhnyi, I.
    Fochuk, P. M.
    Fedorchuk, A. O.
    Levkovets, S. I.
    Yurchenko, O. M.
    Piskach, L. V.
    MATERIALS CHEMISTRY AND PHYSICS, 2017, 187 : 156 - 163
  • [50] Designing highly luminescent nanocrystals embedded bulk single crystals for X-ray scintillators
    Xu, Yinsheng
    Li, Xiaoxi
    Xia, Mengling
    Zhang, Xianghua
    JOURNAL OF LUMINESCENCE, 2022, 248
12345