Laser wavelength and spot diameter dependence of extreme ultraviolet conversion efficiency in ω, 2ω, and 3ω Nd:YAG laser-produced plasmas -: art. no. 261502

被引：22

作者：

Miyamoto, S ^{[1
]}

Shimoura, A ^{[1
]}

Amano, S ^{[1
]}

Fukugaki, K ^{[1
]}

Kinugasa, H ^{[1
]}

Inoue, T ^{[1
]}

Mochizuki, T ^{[1
]}

机构：

[1] Univ Hyogo, Lab Adv Sci & Technol Ind, Kamigori, Hyogo 6781205, Japan

来源：

APPLIED PHYSICS LETTERS | 2005年 / 86卷 / 26期

关键词：

D O I：

10.1063/1.1968415

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Conversion efficiency and spectra of extreme ultraviolet radiations from a cryogenic planar solid xenon target were investigated as a function of laser wavelength (omega, 2 omega, and 3 omega Nd:YAG) and the laser focus spot size (50-700 mu m) at the intensity 10(10)-5x10(12) W/cm(2). The conversion efficiency increased with laser intensity and reached the maximum value at about 10(11) W/cm(2) for all colors. It was found that an edge effect appears more strongly at the omega-laser case, indicating more lateral energy loss, while it appears only weakly for higher harmonics. Shorter-wavelength lasers generated significant conversion efficiencies even at lower laser energies; that is, with smaller laser spots. As the wavelength decreased from omega, 2 omega, and 3 omega, a spectral hump appeared in the extreme ultraviolet band around 13.5 nm region, while the spectral intensity at 10.8 nm drastically decreased. High-energy photon generation in the tail of 10.8 nm peak was found to be strongly suppressed at shorter-wavelength laser (3 omega), while the conversion efficiency at 13.5 nm was as large as that at omega. This indicates that a Xe[XI] ion-rich plasma have been efficiently produced in the ablation plasma by using 3 omega laser without overheating the underdense plasma responsible for extreme ultraviolet emission.

引用

页码：1 / 3

页数：3

共 12 条

[1] X-RAY-EMISSION IN LASER-PRODUCED PLASMAS [J].

COLOMBANT, D ;

TONON, GF .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (08) :3524-3537

[2] ENHANCEMENT OF KEV X-RAY-EMISSION IN LASER-PRODUCED PLASMAS BY A WEAK PREPULSE LASER [J].

KODAMA, R ;

MOCHIZUKI, T ;

TANAKA, KA ;

YAMANAKA, C .

APPLIED PHYSICS LETTERS, 1987, 50 (12) :720-722

[3] Compact high-average-power laser-plasma X-ray source by cryogenic target [J].

Mochizuki, T ;

Shimoura, A ;

Amano, S ;

Miyamoto, S .

APPLICATIONS OF X RAYS GENERATED FROM LASERS AND OTHER BRIGHT SOURCES II, 2001, 4504 :87-96

[4] Laser plasma x-ray source by cryogenic target and high-rep rate slab YAG laser [J].

Mochizuki, T .

HIGH-POWER LASERS IN ENERGY ENGINEERING, 2000, 3886 :306-319

[5] Single spatial mode experiments on initial laser imprint on direct-driven planar targets [J].

Nakai, M ;

Azechi, H ;

Miyanaga, N ;

Shigemori, K ;

Kawasaki, T ;

Nagaya, T ;

Nishikino, M ;

Kanai, Y ;

Ohnuki, D ;

Nishimura, H ;

Shiraga, H ;

Maegawa, O ;

Ishizaki, R ;

Nishihara, K ;

Takabe, H ;

Yamanaka, T .

PHYSICS OF PLASMAS, 2002, 9 (05) :1734-1744

[6]

SASAKI A, 2004, 3 INT EXTR ULTR VIOL

[7] X-ray generation in cryogenic targets irradiated by 1 μm pulse laser [J].

Shimoura, A ;

Amano, S ;

Miyamoto, S ;

Mochizuki, T .

APPLIED PHYSICS LETTERS, 1998, 72 (02) :164-166

[8] Soft x-ray emissions from laser plasma of cryogenic mixture targets [J].

Shimoura, A ;

Mochizuki, T ;

Miyamoto, S ;

Amano, S ;

Uyama, T .

APPLIED PHYSICS LETTERS, 1999, 75 (14) :2026-2028

[9] High power EUV lithography sources based on gas discharges and laser produced plasmas [J].

Stamm, U ;

Ahmad, I ;

Balogh, I ;

Birner, H ;

Bolshukhin, D ;

Brudermann, J ;

Enke, S ;

Flohrer, F ;

Gäbel, K ;

Götze, S ;

Hergenhan, G ;

Kleinschmidt, J ;

Klöpfel, D ;

Korobotchko, V ;

Ringling, J ;

Schriever, G ;

Tran, CD ;

Ziener, C .

EMERGING LITHOGRAPHIC TECHNOLOGIES VII, PTS 1 AND 2, 2003, 5037 :119-129

[10]

TANUMA H, 2004, 3 INT EXTR ULTR VIOL

← 1 2 →