Large-scale integrated optics using TriPleX™ waveguide technology: from UV to IR

被引：21

作者：

Heideman, Rene ^{[1
]}

Leinse, Arne ^{[1
]}

Hoving, Willem ^{[2
]}

Dekker, Ronald ^{[2
]}

Geuzebroek, Douwe ^{[2
]}

Klein, Edwin ^{[2
]}

Stoffer, Remco ^{[3
]}

Roeloffzen, Chris ^{[4
]}

Zhuang, Leimeng ^{[4
]}

Meijerink, Arjan ^{[4
]}

机构：

[1] LioniX Bv, POB 456, NL-7500 AH Enschede, Netherlands

[2] XiO Photon Bv, NL-7500 BG Enschede, Netherlands

[3] PhoeniX Bv, NL-7500 AM Enschede, Netherlands

[4] Univ Twente, Fac Engn Math & Comp Sci, Telecommun Engn Grp, NL-7500 AE Enschede, Netherlands

来源：

PHOTONICS PACKAGING, INTEGRATION, AND INTERCONNECTS IX | 2009年 / 7221卷

关键词：

integrated optics; PLCs; multilayer waveguides; optical waveguides; birefringence; visible; IR; UV; low loss; CMOS compatible;

D O I：

10.1117/12.808409

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleX (TM) waveguide is basically formed by a -preferably rectangular-silicon nitride (Si3N4) shell filled with and encapsulated by silicon dioxide (SiO2). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.

引用

页数：15

共 23 条

[1]

Asghari M., 2008, P OFC NFOEC 2008

[2] Polarization-transparent microphotonic devices in the strong confinement limit [J].

Barwicz, Tymon ;

Watts, Michael R. ;

Popovic, Milos A. ;

Rakich, Peter T. ;

Socci, Luciano ;

Kartner, Franz X. ;

Ippen, Erich P. ;

Smith, Henry I. .

NATURE PHOTONICS, 2007, 1 (01) :57-60

[3]

Driessen A, 2004, AIP CONF PROC, V709, P1, DOI 10.1063/1.1764011

[4]

GEUZEBROEK D, 2003, P ECIO, P395

[5]

Geuzebroek D. H., 2006, WAVELENGTH FILTERS F

[6] Optical transmission characteristics of fiber ring resonators [J].

Heebner, JE ;

Wong, V ;

Schweinsberg, A ;

Boyd, RW ;

Jackson, DJ .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 2004, 40 (06) :726-730

[7]

Heideman R. G., 2007, P ECIO 2007

[8]

Hoving W., SPIE NEWSROOM, V10, P1117

[9] Silicon photonics [J].

Jalali, Bahrain ;

Fathpour, Sasan .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2006, 24 (12) :4600-4615

[10]

Klein E.J., OPTICS EXPRESS, V15, P10346

← 1 2 3 →