Experimental and Theoretical Study of a Piezoelectric Vibration Energy Harvester Under High Temperature

被引：9

作者：

Arroyo, Emmanuelle ^{[1
]}

Jia, Yu ^{[1
]}

Du, Sijun ^{[1
]}

Chen, Shao-Tuan ^{[1
]}

Seshia, Ashwin A. ^{[1
]}

机构：

[1] Univ Cambridge, Nanosci Ctr, Cambridge CB2 1PZ, England

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2017年 / 26卷 / 06期

基金：

英国工程与自然科学研究理事会;

关键词：

Energy harvesting; high temperature; MEMS; cantilever; AlN; ELASTIC PROPERTIES; BEAM RESONATORS; YOUNGS MODULUS; DEPENDENCE; SILICON; MODEL; ALN;

D O I：

10.1109/JMEMS.2017.2723626

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper focuses on studying the effect of increasing the ambient temperature up to 160 degrees C on the power harvested by an MEMS piezoelectric micro-cantilever manufactured using an aluminum nitride-on-silicon fabrication process. An experimental study shows that the peak output power decreases by 60% to 70% depending on the input acceleration. A theoretical study establishes the relationship of all important parameters with temperature and includes them into a temperature-dependent model. This model shows that around 50% of the power drop can be explained by a decreasing quality factor, and that thermal stresses account for around 30% of this decrease. [2017-0071]

引用

页码：1216 / 1225

页数：10

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