Lithographically engineered shallow nitrogen-vacancy centers in diamond for external nuclear spin sensing

被引:22
|
作者
Fukuda, Ryosuke [1 ]
Balasubramanian, Priyadharshini [2 ,3 ]
Higashimata, Itaru [1 ]
Koike, Godai [1 ]
Okada, Takuma [1 ]
Kagami, Risa [1 ]
Teraji, Tokuyuki [4 ]
Onoda, Shinobu [5 ]
Haruyama, Moriyoshi [5 ,6 ]
Yamada, Keisuke [5 ]
Inaba, Masafumi [1 ,9 ]
Yamano, Hayate [1 ]
Stuerner, Felix M. [2 ,3 ]
Schmitt, Simon [2 ,3 ]
McGuinness, Liam P. [2 ,3 ]
Jelezko, Fedor [2 ,3 ]
Ohshima, Takeshi [5 ]
Shinada, Takahiro [7 ]
Kawarada, Hiroshi [1 ]
Kada, Wataru [6 ]
Hanaizumi, Osamu [6 ]
Tanii, Takashi [1 ]
Isoya, Junichi [8 ]
机构
[1] Waseda Univ, Sch Fundamental Sci & Engn, Shinjuku Ku, Tokyo 1698555, Japan
[2] Univ Ulm, Inst Quantum Opt, D-89081 Ulm, Germany
[3] Univ Ulm, Ctr Integrated Quantum Sci & Technol, D-89081 Ulm, Germany
[4] Natl Inst Mat Sci, Tsukuba, Ibaraki 3040044, Japan
[5] Natl Inst Quantum & Radiol Sci & Technol, Takasaki, Gunma 3701292, Japan
[6] Gunma Univ, Fac Sci & Technol, Kiryu, Gunma 3768515, Japan
[7] Tohoku Univ, Ctr Innovat Integrated Elect Syst, Sendai, Miyagi 9800845, Japan
[8] Univ Tsukuba, Res Ctr Knowledge Communities, Tsukuba, Ibaraki 3058550, Japan
[9] Nagoya Univ, Inst Mat & Syst Sustainabil, Nagoya, Aichi 4648603, Japan
来源
NEW JOURNAL OF PHYSICS | 2018年 / 20卷
关键词
diamond; nitrogen-vacancy center; regular array; quantum sensing; NMR; noise analysis; MAGNETIC-RESONANCE-SPECTROSCOPY; SINGLE;
D O I
10.1088/1367-2630/aad997
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The simultaneous control of the number and position of negatively charged nitrogen-vacancy (NV) centers in diamond was achieved. While single near-surface NV centers are known to exhibit outstanding capabilities in external spin sensing, trade-off relationships among the accuracy of the number and position, and the coherence of NV centers have made the use of such engineered NV centers difficult. Namely, low-energy nitrogen implantation with lithographic techniques enables the nanoscale position control but results in degradation of the creation yield and the coherence property. In this paper, we show that low-energy nitrogen ion implantation to a C-12 (99.95%)-enriched homoepitaxial diamond layer using nanomask is applicable to create shallow NV centers with a sufficiently long coherence time for external spin sensing, at a high creation yield. Furthermore, the NV centers were arranged in a regular array so that 40% lattice sites contain single NV centers. The XY8-k measurements using the individual NV centers reveal that the created NV centers have depths from 2 to 12 nm, which is comparable to the stopping range of nitrogen ions implanted at 2.5 keV. We show that the position-controlled NV centers are capable of external spin sensing with a ultra-high spatial resolution.
引用
收藏
页数:9
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