Mapping the electrical properties of large-area graphene

被引:121
作者
Boggild, Peter [1 ]
Mackenzie, David M. A. [1 ]
Whelan, Patrick R. [1 ]
Petersen, Dirch H. [1 ]
Buron, Jonas Due [1 ]
Zurutuza, Amaia [2 ]
Gallop, John [3 ]
Hao, Ling [3 ]
Jepsen, Peter U. [4 ]
机构
[1] Tech Univ Denmark, CNG, Dept Micro & Nanotechnol, Orsteds Plads 345C, DK-2800 Lyngby, Denmark
[2] Graphenea SA, Ave Tolosa 76, Donostia San Sebastin 20018, Spain
[3] Natl Phys Lab, Quantum Detect Grp, Teddington TW11 0LW, Middx, England
[4] Tech Univ Denmark, CNG, Dept Photon Engn, Orsteds Plads 343, DK-2800 Lyngby, Denmark
基金
新加坡国家研究基金会;
关键词
terahertz time-domain spectroscopy; graphene; electrical characterisation; metrology; conductance mapping; resistance mapping; 2D materials; TIME-DOMAIN SPECTROSCOPY; HEXAGONAL BORON-NITRIDE; CHEMICAL-VAPOR-DEPOSITION; SINGLE-CRYSTAL GRAPHENE; TERAHERTZ SPECTROSCOPY; ELECTRONIC TRANSPORT; RAMAN-SPECTROSCOPY; CVD GRAPHENE; HIGH-QUALITY; QUANTITATIVE-DETERMINATION;
D O I
10.1088/2053-1583/aa8683
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The significant progress in terms of fabricating large-area graphene films for transparent electrodes, barriers, electronics, telecommunication and other applications has not yet been accompanied by efficient methods for characterizing the electrical properties of large-area graphene. While in the early prototyping as well as research and development phases, electrical test devices created by conventional lithography have provided adequate insights, this approach is becoming increasingly problematic due to complications such as irreversible damage to the original graphene film, contamination, and a high measurement effort per device. In this topical review, we provide a comprehensive overview of the issues that need to be addressed by any large-area characterisation method for electrical key performance indicators, with emphasis on electrical uniformity and on how this can be used to provide a more accurate analysis of the graphene film. We review and compare three different, but complementary approaches that rely either on fixed contacts (dry laser lithography), movable contacts (micro four point probes) and non-contact (terahertz time-domain spectroscopy) between the probe and the graphene film, all of which have been optimized for maximal throughput and accuracy, and minimal damage to the graphene film. Of these three, the main emphasis is on THz time-domain spectroscopy, which is non-destructive, highly accurate and allows both conductivity, carrier density and carrier mobility to be mapped across arbitrarily large areas at rates that by far exceed any other known method. We also detail how the THz conductivity spectra give insights on the scattering mechanisms, and through that, the microstructure of graphene films subject to different growth and transfer processes. The perspectives for upscaling to realistic production environments are discussed.
引用
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页数:32
相关论文
共 156 条
[1]   A self-consistent theory for graphene transport [J].
Adam, Shaffique ;
Hwang, E. H. ;
Galitski, V. M. ;
Das Sarma, S. .
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2007, 104 (47) :18392-18397
[2]   Screening effect and impurity scattering in monolayer graphene [J].
Ando, Tsuneya .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 2006, 75 (07)
[3]   Fundamental size limitations of micro four-point probes [J].
Ansbaek, Thor ;
Petersen, Dirch H. ;
Hansen, Ole ;
Larsen, Jakob B. ;
Hansen, Torben M. ;
Boggild, Peter .
MICROELECTRONIC ENGINEERING, 2009, 86 (4-6) :987-990
[4]   Graphene: synthesis and applications [J].
Avouris, Phaedon ;
Dimitrakopoulos, Christos .
MATERIALS TODAY, 2012, 15 (03) :86-97
[5]  
Bae S, 2010, NAT NANOTECHNOL, V5, P574, DOI [10.1038/NNANO.2010.132, 10.1038/nnano.2010.132]
[6]   Ballistic Transport Exceeding 28 μm in CVD Grown Graphene [J].
Banszerus, Luca ;
Schmitz, Michael ;
Engels, Stephan ;
Goldsche, Matthias ;
Watanabe, Kenji ;
Taniguch, Takashi ;
Beschoten, Bernd ;
Stampfer, Christoph .
NANO LETTERS, 2016, 16 (02) :1387-1391
[7]   Lithography-free fabrication of high quality substrate-supported and freestanding graphene devices [J].
Bao, Wenzhong ;
Liu, Gang ;
Zhao, Zeng ;
Zhang, Hang ;
Yan, Dong ;
Deshpande, Aparna ;
LeRoy, Brian J. ;
Lau, Chun Ning .
NANO RESEARCH, 2010, 3 (02) :98-102
[8]   Local transport measurements on epitaxial graphene [J].
Baringhaus, J. ;
Edler, F. ;
Neumann, C. ;
Stampfer, C. ;
Forti, S. ;
Starke, U. ;
Tegenkamp, C. .
APPLIED PHYSICS LETTERS, 2013, 103 (11)
[9]   Exceptional ballistic transport in epitaxial graphene nanoribbons [J].
Baringhaus, Jens ;
Ruan, Ming ;
Edler, Frederik ;
Tejeda, Antonio ;
Sicot, Muriel ;
Taleb-Ibrahimi, Amina ;
Li, An-Ping ;
Jiang, Zhigang ;
Conrad, Edward H. ;
Berger, Claire ;
Tegenkamp, Christoph ;
de Heer, Walt A. .
NATURE, 2014, 506 (7488) :349-354
[10]  
Boggild P, 2000, ADV MATER, V12, P947, DOI 10.1002/1521-4095(200006)12:13<947::AID-ADMA947>3.0.CO