Writing Silica Structures in Liquid with Scanning Transmission Electron Microscopy

被引:23
|
作者
de Put, Marcel W. P. van [1 ,2 ]
Carcout, Camille C. M. C. [1 ,2 ]
Bomans, Paul H. H. [1 ,2 ]
Friedrich, Heiner [1 ,2 ]
de Jonge, Niels
Sommerdijk, Nico A. J. M. [1 ,2 ]
机构
[1] Eindhoven Univ Technol, Dept Chem Engn & Chem, Lab Mat & Interface Chem, NL-5600 MB Eindhoven, Netherlands
[2] Eindhoven Univ Technol, Dept Chem Engn & Chem, Soft Matter CryoTEM Res Unit, NL-5600 MB Eindhoven, Netherlands
关键词
liquid cells; STEM; patterning; silica nanoparticles; scanning electron microscopy; atomic force microscopy; NANOCRYSTAL GROWTH; INDUCED DEPOSITION; WATER; BEAM; NANOPARTICLES; ASSEMBLIES; NUCLEATION; RESOLUTION; NITRIDE; CELLS;
D O I
10.1002/smll.201400913
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Silica nanoparticles are imaged in solution with scanning transmission electron microscopy (STEM) using a liquid cell with silicon nitride (SiN) membrane windows. The STEM images reveal that silica structures are deposited in well-defined patches on the upper SiN membranes upon electron beam irradiation. The thickness of the deposits is linear with the applied electron dose. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) demonstrate that the deposited patches are a result of the merging of the original 20 nm-diameter nanoparticles, and that the related surface roughness depends on the electron dose rate used. Using this approach, sub-micrometer scale structures are written on the SiN in liquid by controlling the electron exposure as function of the lateral position.
引用
收藏
页码:585 / 590
页数:6
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