PECVD prepared SnO2 thin films for ethanol sensors

被引：110
作者：
Hellegouarc'h, F [1 ]
Arefi-Khonsari, F [1 ]
Planade, R [1 ]
Amouroux, J [1 ]
机构：
[1] Univ Paris 06, Lab Genie Proc Plasmas & Traitements Surfaces, ENSCP, F-75005 Paris, France
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 73卷 / 01期
关键词：
PECVD; tin oxide; gas sensor;
D O I：
10.1016/S0925-4005(00)00603-1
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
SnO2 thin films are elaborated by a PECVD process in a RF glow discharge reactor. Two kinds of as-deposited films have been studied: unbiased (diode reactor) and biased ones (triode reactor) according to their properties and their response to specific gases such as ethanol. Characterization of the films are carried out by different techniques: FTIR, AES, X-ray diffraction, AFM in order to explain the modifications generated by the bias voltage. The detection results show best sensitivities (S = R-a/R-s) for unbiased films to ethanol at 450 degreesC (S = 45 for 10 ppm). (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：27 / 34
页数：8
相关论文
共 20 条
  • [1] Role of the bias voltage during the deposition of thin tin oxide films by plasma assisted chemical vapor deposition
    Arefi-Khonsari, F
    Hellegouarc'h, F
    Amouroux, J
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1998, 16 (04): : 2240 - 2244
  • [2] BAUDUIN N, 1999, P ISPC 14, V4, P1457
  • [3] Sprayed and thermally evaporated SnO2 thin films for ethanol sensors
    Brousse, T
    Schleich, DM
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1996, 31 (1-2) : 77 - 79
  • [4] CAPEHART TW, 1981, J VAC SCI TECHNOL, V18
  • [5] A NEW SNO2 LOW-TEMPERATURE DEPOSITION TECHNIQUE FOR INTEGRATED GAS SENSORS
    DEMARNE, V
    GRISEL, A
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1993, 15 (1-3) : 63 - 67
  • [6] HABARA H, 1996, SENSOR ACTUAT B-CHEM, V35, P384
  • [7] ICABARROCAS PR, 1994, P 12 EUR PHOT SOL EN, V2, P1272
  • [8] CAPACITANCE EFFECTS AND GASEOUS ADSORPTION ON PURE AND DOPED POLYCRYSTALLINE TIN OXIDE
    LABEAU, M
    SCHMATZ, U
    DELABOUGLISE, G
    ROMAN, J
    VALLETREGI, M
    GASKOV, A
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) : 49 - 52
  • [9] A NEW APPROACH TO SELECTIVE DETECTION OF GAS BY AN SNO2 SOLID-STATE SENSOR
    LALAUZE, R
    PIJOLAT, C
    [J]. SENSORS AND ACTUATORS, 1984, 5 (01): : 55 - 63
  • [10] HALL MEASUREMENT STUDIES AND AN ELECTRICAL-CONDUCTION MODEL OF TIN OXIDE ULTRAFINE PARTICLE FILMS
    OGAWA, H
    NISHIKAWA, M
    ABE, A
    [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) : 4448 - 4455
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