Low-dark current p-on-n MCT detector in long and very long-wavelength infrared

被引:19
作者
Cervera, C. [1 ]
Baier, N. [1 ]
Gravrand, O. [1 ]
Mollard, L. [1 ]
Lobre, C. [1 ]
Destefanis, G. [1 ]
Zanatta, J. P. [1 ]
Boulade, O. [2 ]
Moreau, V. [2 ]
机构
[1] CEA LETI, MINATEC, F-38054 Grenoble, France
[2] CEA IRFU, F-91191 Gif Sur Yvette, France
来源
INFRARED TECHNOLOGY AND APPLICATIONS XLI | 2015年 / 9451卷
关键词
IR Space applications; HgCdTe detectors; LPE heterojunction; VLWIR detector; ION-IMPLANTATION; HGCDTE; TECHNOLOGY;
D O I
10.1117/12.2179216
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents recent developments done at CEA-LETI Infrared Laboratory on processing and characterization of p-on-n HgCdTe (MCT) planar infrared focal plane arrays (FPAs) in LWIR and VLWIR spectral bands. These FPAs have been grown using liquid phase epitaxy (LPE) on a lattice matched CdZnTe substrate. This technology presents lower dark current and lower serial resistance in comparison with n-on-p vacancy doped architecture and is well adapted for low flux detection or high operating temperature. This architecture has been evaluated for space applications in LWIR and VLWIR spectral bands with cutoff wavelengths from 10 mu m up to 17 mu m at 78K. Innovations have been introduced to the technological process to form a heterojunction with a LPE growth technique. The aim was to lower dark current at low temperature, by decreasing currents from the depletion region. Electro-optical characterizations on p-on-n photodiodes have been performed on QVGA format FPAs with 30 mu m pixel pitches. Results show excellent operabilities in current and responsivity, with low dispersion and noise limited by current shot-noise. Studies performed on dark current show that dark current densities are consistent with the heuristic prediction law "Rule07" at 78K. Below this temperature, dark current varies as a pure diffusion current.
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页数:10
相关论文
共 19 条
[1]   MCT planar p-on-n LW and VLW IRFPAs [J].
Baier, N. ;
Mollard, L. ;
Gravrand, O. ;
Bourgeois, G. ;
Zanatta, J-P. ;
Destefanis, G. ;
Boulade, O. ;
Moreau, V. ;
Pinsard, F. ;
Tauziede, L. ;
Bardoux, A. ;
Rubaldo, L. ;
Kerlain, A. ;
Peyrard, J-C. .
INFRARED TECHNOLOGY AND APPLICATIONS XXXIX, 2013, 8704
[2]   Very long wavelength infrared detection with p-on-n LPE HgCdTe [J].
Baier, N. ;
Mollard, L. ;
Gravrand, O. ;
Bourgeois, G. ;
Zanatta, J-P. ;
Destefanis, G. ;
Pidancier, P. ;
Chorier, P. ;
Tauziede, L. ;
Bardoux, A. .
INFRARED TECHNOLOGY AND APPLICATIONS XXXVIII, PTS 1 AND 2, 2012, 8353
[3]  
Baier N., 2009, P SOC PHOTO-OPT INS, V7298
[4]   P ON N ION-IMPLANTED JUNCTIONS IN LIQUID-PHASE EPITAXY HGCDTE LAYERS ON CDTE SUBSTRATES [J].
BUBULAC, LO ;
LO, DS ;
TENNANT, WE ;
EDWALL, DD ;
CHEN, JC ;
RATUSNIK, J ;
ROBINSON, JC ;
BOSTRUP, G .
APPLIED PHYSICS LETTERS, 1987, 50 (22) :1586-1588
[5]   DEFECTS, DIFFUSION AND ACTIVATION IN ION-IMPLANTED HGCDTE [J].
BUBULAC, LO .
JOURNAL OF CRYSTAL GROWTH, 1988, 86 (1-4) :723-734
[6]   ELECTRICAL DOPING OF HGCDTE BY ION-IMPLANTATION AND HEAT-TREATMENT [J].
DESTEFANIS, GL .
JOURNAL OF CRYSTAL GROWTH, 1988, 86 (1-4) :700-722
[7]   From long infrared to very long infrared wavelength focal plane arrays made with HgCdTe n+n-/p ion implantation technology [J].
Gravrand, O. ;
De Borniol, E. ;
Bisotto, S. ;
Mollard, L. ;
Destefanis, G. .
JOURNAL OF ELECTRONIC MATERIALS, 2007, 36 (08) :981-987
[8]   Ultra low dark current CdHgTe FPAs in the SWIR range at CEA and Sofradir [J].
Gravrand, O. ;
Mollard, L. ;
Boulade, O. ;
Moreau, V. ;
Sanson, E. ;
Destefanis, G. .
INFRARED TECHNOLOGY AND APPLICATIONS XXXVIII, PTS 1 AND 2, 2012, 8353
[9]   Study of LWIR and VLWIR Focal Plane Array Developments: Comparison Between p-on-n and Different n-on-p Technologies on LPE HgCdTe [J].
Gravrand, O. ;
Mollard, L. ;
Largeron, C. ;
Baier, N. ;
Deborniol, E. ;
Chorier, Ph. .
JOURNAL OF ELECTRONIC MATERIALS, 2009, 38 (08) :1733-1740
[10]   Improved IR detectors to swap heavy systems for SWaP [J].
Manissadjian, Alain ;
Rubaldo, Laurent ;
Rebeil, Yann ;
Kerlain, Alexandre ;
Brellier, Delphine ;
Mollard, Laurent .
INFRARED TECHNOLOGY AND APPLICATIONS XXXVIII, PTS 1 AND 2, 2012, 8353