Local structure of indium oxynitride from x-ray absorption spectroscopy

被引：36

作者：

T-Thienprasert, J. ^{[1
,2
]}

Nukeaw, J. ^{[3
,4
]}

Sungthong, A. ^{[3
,4
]}

Porntheeraphat, S. ^{[5
]}

Singkarat, S. ^{[6
]}

Onkaw, D. ^{[1
,2
]}

Rujirawat, S. ^{[1
,2
]}

Limpijumnong, S. ^{[1
,2
]}

机构：

[1] Suranaree Univ Technol, Sch Phys, Nakhon 30000, Ratchasima, Thailand

[2] Natl Synchrotron Res Ctr, Nakhon 30000, Ratchasima, Thailand

[3] King Mongkuts Inst Technol Ladkrabang, Nanotechnol Res Ctr KMITL, Bangkok 10520, Thailand

[4] King Mongkuts Inst Technol Ladkrabang, Dept Appl Phys, Bangkok 10520, Thailand

[5] Natl Elect & Comp Technol Ctr, Thai Microelect Ctr, Pathum Thani 12120, Thailand

[6] Chiang Mai Univ, Fac Sci, Fast Neutron Res Facil, Chiang Mai 50200, Thailand

来源：

APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 05期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.2965802

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Synchrotron x-ray absorption near edge structures (XANES) measurements of In L-3 edge is used in conjunction with first principles calculations to characterize rf magnetron sputtered indium oxynitride at different O contents. Good agreement between the measured and the independently calculated spectra are obtained. Calculations show that the XANES spectra of this alloy are sensitive to the coordination numbers of the In atoms, i.e., fourfold for indium nitride-like structures and sixfold for indium oxide-like structures, but not to the substitution of nearest neighbor N by O or vice versa. (C) 2008 American Institute of Physics.

引用

页数：3

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