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Applications for Machine Learning in Semiconductor Manufacturing
被引：1
作者：
Burch, Richard
Merrick, Luke
Zhu, Qing
Honda, Tomonori
David, Jeff
机构：
来源：
2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM)
|
2021年
关键词：
Manufacturing;
FDC;
Modeling;
Machine Learning;
Artificial Intelligence;
D O I：
10.1109/EDTM50988.2021.9421052
中图分类号：
TM [电工技术];
TN [电子技术、通信技术];
学科分类号：
0808 ;
0809 ;
摘要：
This paper presents a machine learning system for comprehensive root cause analysis of low yielding wafers, enabling rapid reaction to correct problems and identify practical actions to reduce the probability and severity of repeated occurrences of the same root cause.
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页数：3
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