Nanoscale calorimetry using a suspended bridge configuration

被引:11
作者
Zhang, Shu [1 ]
Rabin, Yoed
Yang, Yizhang
Asheghi, Mehdi
机构
[1] Seagate Technol, Recording Head Grp, Bloomington, MN 55435 USA
[2] Carnegie Mellon Univ, Dept Mech Engn, Pittsburgh, PA 15213 USA
[3] iCONA Technol, Palo Alto, CA USA
基金
美国国家科学基金会; 美国安德鲁·梅隆基金会;
关键词
differential scanning calorimetry (DSC); frequency domain; nanocalorimetry; suspended bridge; thermal analysis; time domain; DIFFERENTIAL SCANNING CALORIMETER; HEAT-CAPACITY MEASUREMENTS; THERMAL-CONDUCTIVITY; THIN-FILMS; NANOCALORIMETRIC MEASUREMENTS; 3-OMEGA METHOD; NANOSTRUCTURES; SENSITIVITY;
D O I
10.1109/JMEMS.2007.896944
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new setup for small-scale differential scanning calorimetry (DSC) studies based on a suspended bridge configuration is presented. The new setup has three major advantages over previously reported DSC setups: 1) superior temperature uniformity in the bridge cross section; 2) less heat loss to the surroundings by at least two orders of magnitude; and 3) a faster transient response by three orders of magnitude. This paper includes a thermal analysis to support these improvements. A major contribution of the new thermal analysis over previous reports is the inclusion of the thermal mass of the substrate in calculations, which makes thermal design more detailed, dramatically affecting accuracy and sensitivity in measurements. Furthermore, the new thermal analysis more accurately accounts for heat loss to the substrate and the surroundings in efforts to resolve suspected inconsistencies in previously reported data. Experimental validation of the new setup is presented by measuring the specific heat of thin layers of SiO2 and CoFe. The specific heat of SiO2 was found to be 2.2 x 10(6) Jm(-3) K-1, which is nearly 10% different from the literature values of bulk specimens. For CoFe, the specific heat value of 3.16 x 10(6) Jm(-3) K-1 is obtained using differential Cu/SiO2 and Cu/SiO2/CoFe structures compared to the value of 3.5 x 10(6) Jm(-3) K-1 obtained using single CoFe suspended structure.
引用
收藏
页码:861 / 871
页数:11
相关论文
共 23 条
  • [1] Specific heat of endohedral and higher fullerene thin films
    Allen, K
    Hellman, F
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1999, 111 (12) : 5291 - 5294
  • [2] ARX MV, 1988, SENS MATER, V10, P503
  • [3] ARX MV, 1995, SENSOR ACTUAT A-PHYS, V46, P428
  • [4] Calorimetric studies of the A1 to L10 transformation in FePt and CoPt thin films
    Barmak, K
    Kim, J
    Shell, S
    Svedberg, EB
    Howard, JK
    [J]. APPLIED PHYSICS LETTERS, 2002, 80 (22) : 4268 - 4270
  • [5] THERMAL-CONDUCTIVITY MEASUREMENT FROM 30-K TO 750-K - THE 3-OMEGA METHOD
    CAHILL, DG
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (02) : 802 - 808
  • [6] Carslaw HS, 1986, Conduction of Heat in Solids
  • [7] Ultrasensitive, fast, thin-film differential scanning calorimeter
    Efremov, MY
    Olson, EA
    Zhang, M
    Schiettekatte, F
    Zhang, ZS
    Allen, LH
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (01) : 179 - 191
  • [8] Specific heat of amorphous rare-earth-transition-metal films
    Hellman, F
    Abarra, EN
    Shapiro, AL
    van Dover, RB
    [J]. PHYSICAL REVIEW B, 1998, 58 (09): : 5672 - 5683
  • [9] HIGH-SPEED (10(4)-DEGREES-C/S) SCANNING MICROCALORIMETRY WITH MONOLAYER SENSITIVITY (J/M(2))
    LAI, SL
    RAMANATH, G
    ALLEN, LH
    INFANTE, P
    MA, Z
    [J]. APPLIED PHYSICS LETTERS, 1995, 67 (09) : 1229 - 1231
  • [10] Heat capacity measurements of Sn nanostructures using a thin-film differential scanning calorimeter with 0.2 nJ sensitivity
    Lai, SL
    Ramanath, G
    Allen, LH
    Infante, P
    [J]. APPLIED PHYSICS LETTERS, 1997, 70 (01) : 43 - 45