Non-diffraction-length, tunable, Bessel-like beams generation by spatially shaping a femtosecond laser beam for high-aspect-ratio micro-hole drilling

被引:40
作者
Yao, Zhulin [1 ]
Jiang, Lan [1 ]
Li, Xiaowei [1 ]
Wang, Andong [1 ]
Wang, Zhi [1 ]
Li, Ming [2 ]
Lu, Yongfeng [3 ]
机构
[1] Beijing Inst Technol, Sch Mech Engn, Laser Micro Nanofabricat Lab, Beijing 100081, Peoples R China
[2] Chinese Acad Sci, State Key Lab Transient Opt & Photon, Xian Inst Opt & Precis Mech, Xian 710119, Shaanxi, Peoples R China
[3] Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA
来源
OPTICS EXPRESS | 2018年 / 26卷 / 17期
基金
中国国家自然科学基金; 国家重点研发计划;
关键词
ROUND-TIP MICROSTRUCTURES; FIBER; FABRICATION; DYNAMICS; PULSES;
D O I
10.1364/OE.26.021960
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Bessel beams are advantageous in high aspect-ratio microhole drilling because of their immunity to diffraction. However, conventional methods of generating Bessel beams result in poor adjustability of the nondiffraction length. In this study, we theoretically describe and experimentally demonstrate the generation of Bessel-like beams (BLBs) with an adjustable nondiffraction length by using a phase-only spatial light modulator. In this method, nondiffraction lengths varying from 10 to 35 mm can be achieved by changing the designed phase profile (curvature). High-quality, high aspect ratio (560:1) and length-adjustable microholes can be drilled by spatially shaping a femtosecond laser beam. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:21960 / 21968
页数:9
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