Ablation of cobalt with pulsed UV laser radiation

被引：16

作者：

Li, TJ

Lou, QH

Dong, JX

Wei, YR

Liu, JR

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China

[2] NW Inst Nucl Technol, Xian 710024, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2001年 / 172卷 / 3-4期

关键词：

cobalt; surface ablation; excimer laser;

D O I：

10.1016/S0169-4332(00)00883-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The ablation of cobalt with 20 ns pulses of 308 nm XeCl excimer laser radiation is investigated. The dependence of the ablation rate on laser fluence, spot area, and pulse number is determined. The experimental results are compared with a numerical calculation based on an improved thermal model. The model, which considers proper vapor attenuation, is shown to be in good agreement with experiment. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：356 / 365

页数：10

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