SILICON CARBIDE PHONONIC CRYSTAL CAVITIES FOR MICROMECHANICAL RESONATORS

被引：0

作者：

Ziaei-Moayyed, M. ^{[1
]}

Su, M. F.

Reinke, C.

El-Kady, I. F.

Olsson, R. H., III ^{[1
]}

机构：

[1] Sandia Natl Labs, Dept Adv MEMS, POB 5800, Albuquerque, NM 87185 USA

来源：

2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2011年

基金：

美国国家科学基金会; 美国能源部;

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper demonstrates silicon carbide phononic crystal cavities for RF and microwave micromechanical resonators. We demonstrate design, fabrication, and characterization of Silicon Carbide/air phononic crystals used as Bragg acoustic mirrors to confine energy in a lateral SiC cavity. Aluminum nitride transducers drive and sense SiC overtone cavities in the 2-3GHz range with fxQ products exceeding 3x10(13) in air. This approach enables decoupling of the piezoelectric AlN material from the SiC cavity, resulting in high Q resonators at microwave frequencies. The SiC cavities are fabricated in a CMOS-compatible process, enabling integration with wirelesss communication systems.

引用

页码：1377 / 1381

页数：5

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