Synthesis and Gas Sensing Properties of ZnO Nanostructures

被引:24
|
作者
Nguyen Le Hung [1 ,2 ]
Ahn, Eunseong [1 ]
Jung, Hooncheol [1 ]
Kim, Hyojin [1 ]
Kim, Dojin [1 ]
机构
[1] Chungnam Natl Univ, Dept Mat Sci & Engn, Taejon 305764, South Korea
[2] Thai Nguyen Univ Educ, Dept Phys, Thai Nguyen, Vietnam
关键词
Zinc oxide; Gas sensors; Nanostructures; THIN-FILMS; SENSORS; MICROSTRUCTURES; TEMPERATURE; AL;
D O I
10.3938/jkps.57.1784
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We report on the gas sensing properties of ZnO nanostructures synthesized using a simple method combined with sputtering and subsequent thermal oxidation of sputtered metallic films in dry air. By controlling the sputtering condition, we achieved polycrystalline wurtzite ZnO films with a flower-like structure consisting of nanoflakes with a thickness of similar to 20 nm and a wire-like structure having a width of 100 - 150 nm and a length of several microns for deposition temperatures of room temperature and 150 degrees C, respectively. From gas sensing measurements for NH3, CO, and H-2 in dry air, the gas sensors based on ZnO wire-like thin films showed quite better responses than those based on ZnO flower-like thin films. The ZnO wire-like thin film gas sensors exhibited a high sensitivity to NH3 with a maximum sensitivity as high as similar to 300% for 20 ppm NH3 at an operating temperature of 200 degrees C and a detection limit of 2 ppm. In addition, the ZnO wire-like thin film gas sensors also displayed good responses to CO and H-2 exposures. These results illustrate that the ZnO wire-like thin films are very promising for low-cost, high-performance gas sensors.
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页码:1784 / 1788
页数:5
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