Crystalline and dielectric properties of sputter deposited PbTiO3 thin films

被引：14
|
作者：
Dahl, O. [1 ]
Grepstad, J. K. [1 ]
Tybell, T. [1 ]
机构：
[1] Norwegian Univ Sci & Technol, Dept Elect & Telecommun, N-7491 Trondheim, Norway
来源：
JOURNAL OF APPLIED PHYSICS | 2008年 / 103卷 / 11期
关键词：
D O I：
10.1063/1.2937251
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The crystalline and dielectric properties of sputter deposited PbTiO(3) thin films were investigated as a function of the film thickness and growth temperature. The crystalline quality was found to be independent of the film thickness from 2.4 to 200 nm. The capacitance of 0.12 mm(2) Pt/PbTiO(3)/SrRuO(3) and Pt/PbTiO(3)/Nb:SrTiO(3) capacitors was found to deviate from the ideal parallel plate capacitance for PbTiO(3) films thinner than 10 nm. The decrease in capacitance was consistent with field penetration into the electrodes. The surface Pb content, as determined from x-ray photoelectron spectroscopy, was found to decrease with increasing growth temperature from 700 to 760 degrees C. However, no change could be observed in the crystalline quality. (C) 2008 American Institute of Physics.
引用
收藏
页数：8
相关论文
共 50 条
  • [1] Crystalline and dielectric properties of sputter deposited PbTiO 3 thin films
    Dahl, Ø.
    Grepstad, J.K.
    Tybell, T.
    Journal of Applied Physics, 2008, 103 (11):
  • [2] Dielectric properties of thin PbTiO3 films
    Sidorkin, AS
    Solodukha, AM
    Nesterenko, LP
    Ryabtsev, SV
    Bocharova, IA
    Smirnov, GL
    PHYSICS OF THE SOLID STATE, 2004, 46 (10) : 1906 - 1909
  • [3] Dielectric properties of thin PbTiO3 films
    A. S. Sidorkin
    A. M. Solodukha
    L. P. Nesterenko
    S. V. Ryabtsev
    I. A. Bocharova
    G. L. Smirnov
    Physics of the Solid State, 2004, 46 : 1906 - 1909
  • [4] Synthesis and study of dielectric properties of PbTiO3 thin films
    Sidorkin, AS
    Nesterenko, LP
    Bocharova, IA
    Sidorkin, VA
    Smirnov, GL
    FERROELECTRICS, 2003, 286 : 1057 - 1064
  • [5] PbTiO3 thin films deposited by laser ablation
    Imai, Tadayuki
    Okuyama, Masanori
    Hamakawa, Yoshihiro
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1991, 30 (9 B): : 2163 - 2166
  • [6] Growth and micro-Raman study of RF magnetron sputter deposited PbTiO3 thin films
    Srinivas, S
    Bhaskar, S
    Katiyar, RS
    FERROELECTRICS, 1999, 232 (1-4) : 1021 - 1026
  • [7] Properties of ferroelectric PbTiO3 thin films
    Kighelman, Z
    Damjanovic, D
    Cantoni, M
    Setter, N
    JOURNAL OF APPLIED PHYSICS, 2002, 91 (03) : 1495 - 1501
  • [8] PBTIO3 THIN-FILMS DEPOSITED BY LASER ABLATION
    IMAI, T
    OKUYAMA, M
    HAMAKAWA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B): : 2163 - 2166
  • [9] Ferroelectric properties of the epitaxial PbTiO3 thin films
    Wasa, K
    PROGRESS IN NATURAL SCIENCE, 2001, 11 : S1 - S5
  • [10] Investigation of the structural properties of PbTiO3 thin films
    Lima, E. C.
    Guerra, J. D. S.
    Rodrigues, A. D.
    Bernardi, M. I. B.
    M'peko, J-C
    Hernandes, A. C.
    2021 IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (IEEE ISAF 2021) / INTERNATIONAL SYMPOSIUM ON INTEGRATED FUNCTIONALITIES (ISIF) / PIEZORESPONSE FORCE MICROSCOPY WORKSHOP (PFM), 2021,
12345