First-Principles Investigation of Morphological Evolution of Tungsten Growth on Alumina Surfaces: Implications for Thin-Film Growth

被引:3
作者
Park, Hwanyeol [3 ,4 ]
Han, Dong-Hoon [1 ]
Lim, Hong Taek [1 ]
Choi, Woojin [2 ]
Kim, Ho Jun [5 ]
机构
[1] Samsung Elect, Memory Met Technol Team, Giheung Hwaseong Complex, Suwon 445701, South Korea
[2] Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151744, South Korea
[3] Soonchunhyang Univ, Dept Display Mat Engn, Asan 31538, Chungnam, South Korea
[4] Soonchunhyang Univ, Dept Elect Mat Devices & Equipment Engn, Asan 31538, Chungnam, South Korea
[5] Hanyang Univ, Dept Mech Engn, Ansan 15588, Gyeonggi Do, South Korea
基金
新加坡国家研究基金会;
关键词
ab initio; amorphous; cubic; interface; molecular dynamics; ATOMIC LAYER DEPOSITION; INITIO MOLECULAR-DYNAMICS; TIN SURFACES; AMORPHOUS-CARBON; DENSITY; B2H6; NUCLEATION; MECHANISM; CRYSTAL; ENERGY;
D O I
10.1021/acsanm.2c03414
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The fundamentals and interfacial interaction mechanism of tungsten-alumina heterostructures are not yet fully understood. Here, we present a first-principles investigation of the thermodynamic driving force responsible for the phase transition from amorphous to crystalline in the growth of a tungsten thin film on an alumina substrate. Density functional theory and ab initio molecular dynamics collectively provide a first-principles explan-ation of how amorphous tungsten films become thermodynami-cally favorable at finite nanoscales (0.7 nm). The growth of cubic tungsten films is energetically inhibited until the thickness exceeds 0.7 nm. An amorphous tungsten layer would therefore sustain conformal coverage below such a thickness. The approach described here can be applied to computational discovery and design of corrosion-resistant materials, alloys, and semiconductors, providing an ab initio framework to search for methods of optimizing both conductivity and interfacial adhesion. Other possible applications include the synthesis of energy-storage materials, solid-state batteries, and thin-film growth of semiconductor materials, particularly for the prediction of pathways for choosing polymorphs during growth.
引用
收藏
页码:16365 / 16375
页数:11
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