Planar silicon accelerometer with fiber-optic sensing - A system level study

被引：2

作者：

John, J ^{[1
]}

Saha, I ^{[1
]}

Islam, R ^{[1
]}

Joseph, J ^{[1
]}

Lakshmipathy, VV ^{[1
]}

Kanakaraju, K ^{[1
]}

Jain, YK ^{[1
]}

Alex, TK ^{[1
]}

机构：

[1] ISRO, Lab Electroopt Syst, Bangalore 560058, Karnataka, India

来源：

SMART MATERIALS, STRUCTURES, AND SYSTEM, PTS 1 AND 2 | 2003年 / 5062卷

关键词：

MEMS; fiber optic sensors; Fabry-Perot interference; open loop accelerometer;

D O I：

10.1117/12.514568

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the configuration and system design of a single axis silicon micromachined fiber optic accelerometer for inertial navigation systems in spacecraft. The interferometric detection scheme employed to measure the acceleration and the design parameters to be optimized for achieving the required performance of the accelerometer are discussed. The open loop sensitivity of the accelerometer is in the order of milli-g with a dynamic range of +/- 1.2 g.

引用

页码：445 / 449

页数：5

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