Highly enhanced piezoelectric property of co-doped AlN

被引：61

作者：

Iwazaki, Yoshiki ^{[1
]}

Yokoyama, Tsuyoshi ^{[1
]}

Nishihara, Tokihiro ^{[1
]}

Ueda, Masanori ^{[1
]}

机构：

[1] Taiyo Yuden Co Ltd, Taito, Tokyo 1100005, Japan

来源：

APPLIED PHYSICS EXPRESS | 2015年 / 8卷 / 06期

关键词：

THIN-FILMS;

D O I：

10.7567/APEX.8.061501

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose a series of new compositions of AlN-based piezoelectric material based on the results of first-principles calculation. The composition is expressed by (alpha(y),beta(1-y))(x)Al1-xN, where the elements alpha and beta are selected to maintain the charge neutrality of the host AlN. We found that the selection of Mg2+ for a and Hf4+ and Zr4+ for beta with y = 0.5 show good chemical stability with much better piezoelectric properties than pure AlN. Our results indicate broad compositional freedom for improving the piezoelectric properties of AlN by using the co-doping technique. (C) 2015 The Japan Society of Applied Physics

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页数：4

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