Nanopatterned Surfaces Based on Template-Assisted Multilayer Electrodeposition

被引：8
|
作者：
Kim, Minsoo [1 ]
Kim, Jooncheol [1 ]
Allen, Mark [2 ]
机构：
[1] Georgia Inst Technol, Sch Elect Engn & Comp Sci, Atlanta, GA 30332 USA
[2] Univ Penn, Dept Elect & Syst Engn, Philadelphia, PA 19104 USA
来源：
Small | 2015年 / 11卷 / 16期
关键词：
NANOIMPRINT LITHOGRAPHY; FABRICATION; ARRAYS; FILMS; NANOSTRUCTURES; NANOMOLD; PATTERNS; SILICON;
D O I：
10.1002/smll.201402584
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Selective, template-assisted growth of electrodeposited, layered materials leads to the top-down designable realization of nanopatterned surfaces with a large surface area (>1 cm2) comprised of multidimensional, multiscale (10 nm-1 μm) features, without the need of standard nanolithography. This process opens a manufacturable route to functional nanodevices that rely on anisotropic, nanoscale surface structures with controlled dimensions. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：1912 / 1918
页数：7
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