Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

被引：46

作者：

Jiang, Xiaohong ^{[1
]}

Wu, Guoyun ^{[1
]}

Zhou, Jingfang ^{[2
]}

Wang, Shujie ^{[1
]}

Tseng, Ampere A. ^{[3
]}

Du, Zuliang ^{[1
]}

机构：

[1] Henan Univ, Minist Educ, Key Lab Special Funct Mat, Kaifeng 475004, Peoples R China

[2] Univ S Australia, Ian Wark Res Inst, Mawson Lakes, SA 5095, Australia

[3] Arizona State Univ, Sch Engn Matter Transport & Energy, Tempe, AZ 85287 USA

来源：

NANOSCALE RESEARCH LETTERS | 2011年 / 6卷

基金：

中国国家自然科学基金;

关键词：

NANOLITHOGRAPHY; LITHOGRAPHY; OXIDATION; FILMS; DEVICES; SCRATCH; TIP;

D O I：

10.1186/1556-276X-6-518

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Atomic force microscope (AFM) equipped with diamond-like carbon (DLC)-coated Si probe has been used for scratch nanolithography on Si surfaces. The effect of scratch direction, applied tip force, scratch speed, and number of scratches on the size of the scratched geometry has been investigated. The size of the groove differs with scratch direction, which increases with the applied tip force and number of scratches but decreases slightly with scratch speed. Complex nanostructures of arrays of parallel lines and square arrays are further fabricated uniformly and precisely on Si substrates at relatively high scratch speed. DLC-coated Si probe has the potential to be an alternative in AFM-based scratch nanofabrication on hard surfaces.

引用

页码：1 / 7

页数：7

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