Microstructured diamond X-ray source and refractive lens

被引:9
作者
Ribbing, C
Cederström, B
Lundqvist, M
机构
[1] Uppsala Univ, Angstrom Lab, SE-75121 Uppsala, Sweden
[2] Royal Inst Technol, SCFAB, SE-10691 Stockholm, Sweden
关键词
micromachining; X-ray; field emission; CVD;
D O I
10.1016/S0925-9635(03)00206-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper treats microstructured CVD diamond in two X-ray applications, a miniature X-ray source and a refractive X-ray lens. The X-ray source consists of boron doped diamond membrane electrodes and an intermediate insulator. The cathode has a pyramidal shape, which is field-emitting and the anode is a metal film on a diamond membrane. Anode radiation emerges through both membrane electrodes. The source has not been vacuum sealed, therefore, all measurements so far have been made in a vacuum chamber. The refractive X-ray lens has saw-tooth geometry and a tunable focal length. It was made by microwave plasma assisted CVD of diamond onto anisotropically etched silicon masters. The lens has been used for one-dimensional focusing of a synchrotron beam to 1.9 mum line width. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1793 / 1799
页数:7
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