High-performance and compact integrated photonics platform based on silicon rich nitride-lithium niobate on insulator

被引：21
作者：
Huang, Xingrui [1 ,3 ]
Liu, Yang [1 ]
Li, Zhiyong [1 ]
Fan, Zhongchao [2 ]
Han, Weihua [2 ]
机构：
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
[2] Chinese Acad Sci, Engn Res Ctr Semicond Integrated Technol, Inst Semicond, Beijing 100083, Peoples R China
[3] Univ Chinese Acad Sci, Mat Sci & Optoelect Technol, Beijing 100083, Peoples R China
来源：
APL PHOTONICS | 2021年 / 6卷 / 11期
关键词：
BROAD-BAND; WAVE-GUIDES; MODULATOR; BANDWIDTH; GHZ;
D O I：
10.1063/5.0065437
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this paper, a silicon rich nitride-lithium niobate on insulator hybrid platform with waveguides and several key components is proposed. The propagation loss of the silicon rich nitride-lithium niobate rib-loaded waveguide (300 x 300 nm(2)) is 0.86 dB/cm at 1550 nm. Passive devices, including adiabatic power splitters, multimode interferometer-based splitters, asymmetrical Mach-Zehnder interferometers, and Bragg grating filters, are fully designed and characterized. Moreover, we report a Mach-Zehnder modulator with high-speed modulation up to 120 GBaud without digital compensation. The electro-optical response with 1 dB roll-off at 40 GHz is obtained, and the 3-dB modulation bandwidth is predicted to be > 100 GHz. Hence, the proposed platform enables high-performance passive and active devices with low loss and high integration density, making it a promising candidate for emerging photonics integrated circuits.</p>
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收藏
页数：11
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共 36 条
[1]   High-efficiency lithium niobate modulator for K band operation [J].
Ahmed, Abu Naim R. ;
Shi, Shouyuan ;
Mercante, Andrew ;
Nelan, Sean ;
Yao, Peng ;
Prather, Dennis W. .
APL PHOTONICS, 2020, 5 (09)
[2]   High-performance racetrack resonator in silicon nitride - thin film lithium niobate hybrid platform [J].
Ahmed, Abu Naim R. ;
Shi, Shouyuan ;
Mercante, Andrew J. ;
Prather, Dennis W. .
OPTICS EXPRESS, 2019, 27 (21) :30741-30751
[3]   Bragg gratings in thin-film LiNbO3 waveguides [J].
Baghban, Mohammad Amin ;
Schollhammer, Jean ;
Errando-Herranz, Carlos ;
Gylfason, Kristinn B. ;
Gallo, Katia .
OPTICS EXPRESS, 2017, 25 (26) :32323-32332
[4]   Silicon Nitride in Silicon Photonics [J].
Blumenthal, Daniel J. ;
Heideman, Rene ;
Geuzebroek, Douwe ;
Leinse, Arne ;
Roeloffzen, Chris .
PROCEEDINGS OF THE IEEE, 2018, 106 (12) :2209-2231
[5]   Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits [J].
Boes, Andreas ;
Corcoran, Bill ;
Chang, Lin ;
Bowers, John ;
Mitchell, Arnan .
LASER & PHOTONICS REVIEWS, 2018, 12 (04)
[6]   Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications [J].
Bucio, Thalia Dominguez ;
Khokhar, Ali Z. ;
Lacava, Cosimo ;
Stankovic, Stevan ;
Mashanovich, Goran Z. ;
Petropoulos, Periklis ;
Gardes, Frederic Y. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2017, 50 (02)
[7]   Heterogeneous integration of lithium niobate and silicon nitride waveguides for wafer-scale photonic integrated circuits on silicon [J].
Chang, Lin ;
Pfeiffer, Martin H. P. ;
Volet, Nicolas ;
Zervas, Michael ;
Peters, Jon D. ;
Manganelli, Costanza L. ;
Stanton, Eric J. ;
Li, Yifei ;
Kippenberg, Tobias J. ;
Bowers, John E. .
OPTICS LETTERS, 2017, 42 (04) :803-806
[8]   Thin film wavelength converters for photonic integrated circuits [J].
Chang, Lin ;
Li, Yifei ;
Volet, Nicolas ;
Wang, Leiran ;
Peters, Jon ;
Bowers, John E. .
OPTICA, 2016, 3 (05) :531-535
[9]   Polarization-insensitive broadband 2 x 2 3 dB power splitter based on silicon-bent directional couplers [J].
Chen, Xun ;
Liu, Weixi ;
Zhang, Yuguang ;
Shi, Yaocheng .
OPTICS LETTERS, 2017, 42 (19) :3738-3740
[10]   Extreme electro-optic tuning of Bragg mirrors integrated in lithium niobate nanowaveguides [J].
Escale, Marc Reig ;
Pohl, David ;
Sergeyev, Anton ;
Grange, Rachel .
OPTICS LETTERS, 2018, 43 (07) :1515-1518
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