A PMUT INTEGRATED MICROFLUIDIC SYSTEM FOR VOLUMETRIC FLOW RATE SENSING

被引：0

作者：

Roy, Kaustav ^{[1
]}

Kalyan, Kritank ^{[1
]}

Ashok, Anuj ^{[1
]}

Shastri, Vijayendra ^{[1
]}

Pratap, Rudra ^{[1
]}

机构：

[1] Indian Inst Sci, Ctr Nano Sci & Engn, Bengaluru, Karnataka, India

来源：

2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2021年

关键词：

PMUT; microfluidics; volume flow rate; flow sensing; MEMS transducer; micromachining;

D O I：

10.1109/TRANSDUCERS50396.2021.9495576

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We exhibit the design and fabrication of a linear array of single-celled dual-electrode piezoelectric micromachined ultrasound transducers (PMUTs) and integrate them with a microfluidic channel. The integrated device forms an independent platform to sense the resonant peak shift in a reasonably low volume of fluids. We subsequently pitch on a novel technique of volumetric flow rate sensing based on resonant frequency shift, thereby demonstrating the PMUT-microfluidic integrated device's potentiality as a volumetric flow rate sensor. The sensitivity of the device to volume flow rate sensing is reported to be 537 ms/mu l/hr.

引用

页码：172 / 175

页数：4

共 23 条

[1]

Behera A. R., 2020, ECS M, P2215

[2] An Ultra-Portable Vis-NIR Spectrometer with an Integrated Light Source for Chemometric Applications [J].

Behera, Amruta Ranjan ;

Kumar, Avinash ;

Suresh, Hasika ;

Pratap, Manas ;

Selvaraja, Shankar Kumar ;

Pratap, Rudra .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2020, 167 (16)

[3] A modular approach to neonatal whole-brain photoacoustic imaging [J].

Dangi, Ajay ;

Roy, Kaustav ;

Agrawal, Sumit ;

Chen, Haoyang ;

Ashok, Anuj ;

Wible, Christopher ;

Osman, Mohamed ;

Pratap, Rudra ;

Kothapalli, Sri-Rajasekhar .

PHOTONS PLUS ULTRASOUND: IMAGING AND SENSING 2020, 2020, 11240

[4] Design and applications of MEMS flow sensors: A review [J].

Ejeian, Fatemeh ;

Azadi, Shohreh ;

Razmjou, Amir ;

Orooji, Yasin ;

Kottapalli, Ajay ;

Warkiani, Majid Ebrahimi ;

Asadnia, Mohsen .

SENSORS AND ACTUATORS A-PHYSICAL, 2019, 295 :483-502

[5] Carbon nanotube flow sensors [J].

Ghosh, S ;

Sood, AK ;

Kumar, N .

SCIENCE, 2003, 299 (5609) :1042-1044

[6]

Gupta H., 2020, 2020 IEE INT ULTR S, P1, DOI [10.1109/ 10. 1109/IUS46767.2020.9251747, DOI 10.1109/10.1109/IUS46767.2020.9251747]

[7] Electric field induced patterning in Cr film under ambient conditions: A chemical reaction based perspective [J].

Kumar, Sumit ;

Suresh, Hasika ;

Sethuraman, Vijay A. ;

Kumar, Praveen ;

Pratap, Rudra .

SN APPLIED SCIENCES, 2020, 2 (12)

[8] Microfluidic flow rate detection based on integrated optical fiber cantilever [J].

Lien, Victor ;

Vollmer, Frank .

LAB ON A CHIP, 2007, 7 (10) :1352-1356

[9] Fabrication and characterization of a directional anemometer based on a single chip MEMS flow sensor [J].

Piotto, M. ;

Pennelli, G. ;

Bruschi, P. .

MICROELECTRONIC ENGINEERING, 2011, 88 (08) :2214-2217

[10] Fluid Spectroscopy with Piezoelectric Ultrasound MEMS Transducers [J].

Pratap, R. ;

Dangi, A. ;

Roy, K. ;

Gupta, H. .

WEARABLE SENSORS AND SYSTEMS 1 -AND - MICROFABRICATED AND NANOFABRICATED SYSTEMS FOR MEMS/NEMS 14, 2018, 86 (16) :13-20

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