Carbonized Polymer Nanostructures for Biosensing

被引：1

作者：

Haque, Mohammad Aminul ^{[1
]}

McFarlane, Nicole ^{[1
]}

Lavrik, Nickolay V. ^{[2
]}

Hensley, Dale ^{[2
]}

机构：

[1] Univ Tennessee, Elect Engn & Comp Sci, Knoxville, TN 37996 USA

[2] Oak Ridge Natl Lab, Ctr Nanophase Mat Sci, Oak Ridge, TN USA

来源：

2019 30TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC) | 2019年

关键词：

nanostructures; polymer; carbonization; biosensing; CMOS; ELECTROCHEMICAL PROPERTIES; NANOTUBES; NANOFIBERS; HYDROGEN; GROWTH; NAFION;

D O I：

10.1109/asmc.2019.8791748

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have implemented carbonized nanostructures on metalized silica substrates as a step towards their integration on CMOS chips. The substrates were metallized successively with Ti and Au to provide electrical contact to the carbonized structures. Polymeric structures have been formed using 3D printing based on 2-photon polymerization. Carbonization of the polymeric structures has been achieved through a sequence of two thermal annealing steps in oxidative and inert atmospheres, respectively. Carbonization has been verified by Raman spectroscopy. Scanning electron microscopy images confirm the formation of structures and their morphology on the substrate. Integration of the demonstrated carbon structures with CMOS circuitries offer great promise for electrochemical biosensors.

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页数：5

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