System on glass display with LTPS-TFTs formed using SELAX technology

被引:0
作者
Hatano, M. [1 ]
Sato, T. [1 ]
Matsumura, M. [1 ]
Toyota, Y. [1 ]
Tai, M. [1 ]
Ohkura, M.
Miyazawa, T.
机构
[1] Hitachi Ltd, Cent Res Lab, Tokyo 1858601, Japan
来源
IDW/AD '05: PROCEEDINGS OF THE 12TH INTERNATIONAL DISPLAY WORKSHOPS IN CONJUNCTION WITH ASIA DISPLAY 2005, VOLS 1 AND 2 | 2005年
关键词
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暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
SELAX technology can form TFTs with high mobility, low sub-threshold swing and small threshold voltage deviation that they can be used to integrate high performance circuits and valuable functions on glass substrates. By using hybrid laser crystallization technology: SELAX are applied to low-power, high-speed circuits, and conventional ELC are used for the high-voltage circuits, the process tact time can be reduced. Narrow frame size IPS-mode LCD panels with resolution of over 300 ppi have been developed utilizing SELAX based technologies.
引用
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页码:953 / 956
页数:4
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