Enhancement of deep acceptor activation in semiconductors by superlattice doping

被引:130
作者
Schubert, EF
Grieshaber, W
Goepfert, ID
机构
[1] Center for Photonics Research, Dept. of Elec. and Comp. Engineering, Boston University, Boston
关键词
D O I
10.1063/1.117206
中图分类号
O59 [应用物理学];
学科分类号
摘要
The thermal activation of accepters in wide-gap semiconductors can be very low due to large acceptor activation energies. It is shown that superlattice doping, i.e., the composition modulation of a uniformly doped ternary semiconductor, can enhance the acceptor activation by more than one order of magnitude. (C) 1996 American Institute of Physics.
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页码:3737 / 3739
页数:3
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