Polysilicon MEMS Resonator for 28-MHz Oscillators

被引：2

作者：

Mussi, Giorgio ^{[1
]}

Carrara, Mattia ^{[1
]}

Langfelder, Giacomo ^{[1
]}

Gattere, Gabriele ^{[2
]}

机构：

[1] Politecn Milan, Dipartimento Elettron Informaz & Bioingn, Milan, Italy

[2] STMicroelectronics, Analog & MEMS Grp, Cornaredo, Italy

来源：

PROCEEDINGS OF THE 2019 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EUROPEAN FREQUENCY AND TIME FORUM (EFTF-IFCS 2019) | 2019年

关键词：

clock; MEALS; oscillator; phase noise;

D O I：

10.1109/fcs.2019.8856011

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In a time where MEMS resonators are challenging the leadership of quartz-based clocks, this work presents a prototype 28 MHz polysilicon resonator and oscillator topologies for 4G/GPS applications, showing noise and consumption performances in line with the standard requirements.

引用

页数：3

共 6 条

[1] The Dependence of Fatigue in Microelectromechanical Systems on the Environment and the Industrial Packaging [J].

Langfelder, Giacomo ;

Dellea, Stefano ;

Zaraga, Federico ;

Cucchi, Dario ;

Urquia, Mikel Azpeitia .

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2012, 59 (12) :4938-4948

[2]

Maxwell J. Clerk, 1892, TREATISE ELECT MAGNE, V2, P68, DOI DOI 10.1016/J.SBSPR0.2010.03.285

[3]

Mussi G, 2018, PROC IEEE MICR ELECT, P711, DOI 10.1109/MEMSYS.2018.8346654

[4]

Partridge A, 2013, JOINT CONF IEEE INT, P411, DOI 10.1109/EFTF-IFC.2013.6702311

[5]

Roshan MH, 2016, ISSCC DIG TECH PAP I, V59, P200, DOI 10.1109/ISSCC.2016.7417976

[6] HIGH-PERFORMANCE CRYSTAL-OSCILLATOR CIRCUITS - THEORY AND APPLICATION [J].

VITTOZ, EA ;

DEGRAUWE, MGR ;

BITZ, S .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1988, 23 (03) :774-783

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